Alumina Sputtering

From: Bahareh Behkam (bbehkam@andrew.cmu.edu)
Date: Sat Jan 25 2003 - 19:29:37 EST

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I have been trying to sputter Alumina using an alumina target and Ar as
bleeding gas. Although the resulting film appears transparent, X-ray
scanning shows that deposited film has high percentage of Aluminum
polycrystalline grains. Anybody knows of a recipe which results pure alumina
film.

Thanks
Bahar

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