Greetings all,
We are in the process of completing our renovation of the existing fab at San Jose State.
We have an operational question and was hoping for some feedback. The question pertains
to the way in which you handle the rinse water waste stream from your organic benches. In
particular, we are interested in the rinse water from a puddle developer using positive
resist and TMAH developer. In addition, we have a sink using Microstrip 2001, and would
be interested in learning how you handle the rinse water from this type of sink.
The rinse water waste from all the sinks are connected to a waste water tank in our
central courtyard. Once the tank is full, we check the pH and pump to sanitary sewer if
it falls within acceptable limits. The acid baths from the sinks are locally drained in
the lab and picked up for disposal offsite. I am wondering if it would be a problem to
dump this very dilute rinse water from the puddle developer and post metal resist strip
bench into the tank as well. Any help will be most appreciated. Thanks in advance.
Regards,
Neil Peters
Process Lab Engineer
Department of Chemical and Materials Engineering
http://www.engr.sjsu.edu/cme
San Jose State University voice: (408) 924-3967
One Washington Square fax: (408) 924-4057
San Jose, CA 95192-0082
E-mail: npeters@email.sjsu.edu
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