To TEOS experts,
we want to install a TEOS supply for experiments on depositing SiO2 by
PE-CVD. The TEOS supply must be clean. The setup should not be
complicated/expensive, because we just plan to test TEOS. Depending on
success we will keep/expand or dismount the setup.
To keep control over the PE-CVD parameter space, we would like to avoid
using a carrier gas for TEOS. But if we must use one, it must be inert
(noble gas, N2; no H2).
Should we set up a heated-source TEOS vapor supply, or a liquid supply?
What's involved? What do we need to watch? Where can we find reliable
experimental info?
All help will be appreciated.
Sigurd Wagner.
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