methylene chloride and titanium

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Hello list,

Is the methylene chloride I use for lift-off of PMMA attacking my Titanium? I typically soak overnight for lift-off.

I have a 50 A Ti adhesion layer under 450 A Au, and feature size is in the 10s of nm. Everything looks fine after liftoff, but some of the small features seem to lift up after subsequent processing.

Would Cr be a better choice for an adhesion layer in this case?

Thanks much,
Bill Lanford-Crick

University of Illinois
Micro and Nanotechnology Lab

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• Next message: chirag patel: "Au-Sn Solder"
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