Plasmalab/Oxford PECVD-RIE for sale

From: Vicky Diadiuk (diadiuk@mit.edu)
Date: Thu Dec 18 2003 - 15:05:55 EST


Hi,
  We have a Plasmalab/Oxford PECVD-RIE for sale.
Dual chamber, heated chuck (to ~300oC), plumbed for numerous gases
It's a manually loaded chamber, that'll handle up to 6" wafers, &/or pieces

We are decommissioning it w/sale in mind, so all lines are capped,
labeled, etc.
  It was operational prior to decommissioning.

Pls let me know if this is of interest & make an offer.

Thx,
  Vicky
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