TaN RIE etch

From: David Kelly (dkelly@mail.utexas.edu)
Date: Mon Jan 05 2004 - 17:48:03 EST

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Could someone please tell me the best RIE etch chemistry for selectively
etching TaN over SiO2? My understanding is that CF4/O2 is not as selective
as a ClF3 chemistry. Does someone have any information on this?

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