I am responsible for taking a SVGL MICRASCAN 3 stepper system from its
current operational location at an eastcoast semiconductor fab and getting
it placed at a new location. SVGL MICRASCAN III DUV STEPPER .. SERIAL
NUMBER QM6 .. 200MM . 248NM . CYMER-AXIOM EXIMER LASER #EX5700 . OFF AXIS
ALIGNMENT . 4:1 REDUCTION . FIELD SIZE 26 X 32.5MM. 0.25UM @ 44 WPH . DNS
INTERFACE
The system will be deinstalled by ASML (who bought the SVG Micrascan product
line and has stopped its manufacture) engineers during January 2004. It
will then be packaged, crated and shipped to a location of my choice. This
will be at no cost to the future user.
Reinstallation and operation startup can be discussed. I cannot reinstall
or start the system without the help of ASML, or engineers familiar with
this product line.
This system would be ideal in an r&d location, or as a state of the art
lithography stepper system for students.
Because the current market for steppers favors newer, currently supported
manufacturers and models, this system may go to an auction or be available
for parts.
Pricing or terms will be very favorable to an organization who would want to
consider this system.
>From Businessweek Summary 28-APR-97
Silicon Valley Group (SVG) makes and services semiconductor processing
equipment used in the fabrication of integrated circuits.
Photolithography exposure products are manufactured through SVG Lithography
Systems (SVGL). SVGL has two broad product families: Micrascan step-and scan
systems, and the more mature Micralign scanning projection aligners. The
company believes that its Micrascan system provides the greater resolution
required for the next generation of complex, fine geometry integrated
circuits through its use of a deep ultraviolet (Deep UV) light source, and
overcomes the throughput and yield limitations of steppers by combining the
elements of both steppers and scanners into Micrascan's "step and scan"
technology. Step and scan combines the advantages of scanning projection
aligners and steppers by scanning only a portion of the wafer, then stepping
to another portion of the wafer and repeating the process as needed.
The company believes that its recently introduced Micrascan III stepper is
the most technologically advanced product of its kind, but does not expect
semiconductor manufacturers to purchase it in substantial volumes until late
1997. SVG has entered into agreements with Intel Corp., Motorola Inc., Texas
Instruments Inc., IBM and industry consortium Sematech, pursuant to which
these semiconductor makers have made equity investments in the company.
>From the html version of the file
http://www.semiconductorfabtech.com/journals/edition.09/download/ft09-05_02.
pdf.
SVGL's Micrascan III third-generation scanner tool introduced in 1996, was
the result of adding a KrF laser illuminator to a 0.6 numerical aperture
optics design based on the Micrascan II's proven catadioptric lens and
air-bearing/magnetically levitated stage technologies. The Micrascan III
allowed the extension of deep-UV applications to below 200nm with the use of
applications-driven combinations of higher performance resists, off-axis
illumination(OAI), and reticle enhancement techniques (RET).The advent of
the Micrascan III also brought a very flexible OAI package that can support
nearly arbitrary illumination strategies. The uniform, quadrapole and
annular pupil fill schemes are supported with minimal reduction in overall
intensity.
Dennis Goodline
Technology Investment Partners
831 633 5624 voice
831 633 5197 fax
408 476 0567 cell and page
www.tipelectronics.com
tip: (tip) n. 1. a collection of information that informs/provides a
tactical advantage.
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