I want to send this email to the labnetwork ...
I am responsible for taking a SVGL MICRASCAN 3 stepper
system from its current operational location at an
eastcoast semiconductor fab and getting it placed at a
new location. SVGL MICRASCAN III DUV STEPPER ..
SERIAL NUMBER QM6 .. 200MM … 248NM … CYMER-AXIOM
EXIMER LASER #EX5700 … OFF AXIS ALIGNMENT … 4:1
REDUCTION … FIELD SIZE 26 X 32.5MM… 0.25UM @ 44 WPH …
The system will be deinstalled by ASML (who bought the
SVG Micrascan product line and has stopped its
manufacture) engineers during January 2004. It will
then be packaged, crated and shipped to a location of
my choice - maybe to you. This will be at no cost to
the future user.
Reinstallation and operation startup can be discussed.
I cannot reinstall or start the system without the
help of ASML, or engineers familiar with this product
This system would be ideal in an r&d location, or as a
state of the art lithography stepper system for
Because the current market for steppers favors newer,
currently supported manufacturers and models, this
system may go to an auction or be available for parts.
Pricing or terms will be very favorable to an
organization who would want to consider this system.
>From Businessweek Summary 28-APR-97
Silicon Valley Group (SVG) makes and services
semiconductor processing equipment used in the
fabrication of integrated circuits.
Photolithography exposure products are manufactured
through SVG Lithography Systems (SVGL). SVGL has two
broad product families: Micrascan step-and scan
systems, and the more mature Micralign scanning
projection aligners. The company believes that its
Micrascan system provides the greater resolution
required for the next generation of complex, fine
geometry integrated circuits through its use of a deep
ultraviolet (Deep UV) light source, and overcomes the
throughput and yield limitations of steppers by
combining the elements of both steppers and scanners
into Micrascan's "step and scan" technology. Step and
scan combines the advantages of scanning projection
aligners and steppers by scanning only a portion of
the wafer, then stepping to another portion of the
wafer and repeating the process as needed.
The company believes that its recently introduced
Micrascan III stepper is the most technologically
advanced product of its kind, but does not expect
semiconductor manufacturers to purchase it in
substantial volumes until late 1997. SVG has entered
into agreements with Intel Corp., Motorola Inc., Texas
Instruments Inc., IBM and industry consortium
Sematech, pursuant to which these semiconductor makers
have made equity investments in the company.
>From the html version of the file
SVGL’s Micrascan III third-generation scanner tool
introduced in 1996, was the result of adding a KrF
laser illuminator to a 0.6 numerical aperture optics
design based on the Micrascan II’s proven catadioptric
lens and air-bearing/magnetically levitated stage
technologies. The Micrascan III allowed the extension
of deep-UV applications to below 200nm with the use of
applications-driven combinations of higher performance
resists, off-axis illumination(OAI), and reticle
enhancement techniques (RET).The advent of the
Micrascan III also brought a very flexible OAI package
that can support nearly arbitrary illumination
strategies. The uniform, quadrapole and annular pupil
fill schemes are supported with minimal reduction in
831 633 5624
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