MEMS at MIT MEMS@MIT
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Research Areas
Materials, Processes, and Devices for MEMS
Biological and Chemical MEMS
Actuators and Power MEMS
Sensors, Systems, and Modeling

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Enabling Technologies

  1. A Double-gated CNF Tip Array for Electron-impact Ionization and Field Ionization
  2. A Double-gated Silicon Tip, Electron-Impact Ionization Array
  3. A Single-Gated CNT Field-Ionizer Array with Open Architecture
  4. Aligning and Latching Nano-structured Membranes in 3D Micro-Structures
  5. Characterization and Modeling of Non-uniformities in DRIE
  6. Understanding Uniformity and Manufacturability in MEMS Embossing
  7. Atomic Force Microscopy with Inherent Disturbance Suppression for Nanostructure Imaging
  8. Vacuum-Sealing Technologies for Micro-chemical Reactors
  9. Direct Patterning of Organic Materials and Metals Using Micromachined Printheads
  10. MEMS Vacuum Pump
  11. Rapid and Shape-Controlled Growth of Aligned Carbon Nanotube Structures
  12. Prediction of Variation in Advanced Process Technology Nodes
  13. Parameterized Model Order Reduction of Nonlinear Circuits and MEMS
  14. Development of Specialized Basis Functions and Efficient Substrate Integration Techniques for Electromagnetic Analysis of Interconnect and RF Inductors
  15. A Quasi-convex Optimization Approach to Parameterized Model-order Reduction
  16. Amorphous Zinc-Oxide-Based Thin-film Transistors
  17. Magnetic Rings for Memory and Logic Devices
  18. Studies of Field Ionization Using PECVD-grown CNT Tips
  19. Growth of Carbon Nanotubes for Use in Origami Supercapacitors
  20. Self-Alignment of Folded, Thin-Membranes via Nanomagnet Attractive Forces
  21. Control System Design for the Nanostructured Origami™ 3D Nanofabrication Process
  22. Measuring Thermal and Thermoelectric Properties of Single Nanowires and Carbon Nanotubes
  23. Nanocomposites as Thermoelectric Materials
  24. CNT Assembly by Nanopelleting
  25. Templated Assembly by Selective Removal
  26. Building Three-dimensional Nanostructures via Membrane Folding