MEMS at MIT MEMS@MIT
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Research Areas
Chemical/Mechanical/Optical MEMS
BioMEMS
Enabling Technology
Power MEMS

 

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Faculty Profiles

A.I. Akinwande

Flat panel displays,Vacuum Microelectronics and its application to flat panel displays, RF power sources, and sensors. Wide bandgap semiconductors and applications to flat panel displays, UV emitters and RF power sources

 

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G. Barbastathis

Biomedical design instrumentation; precision engineering robotics; volume holographic architectures for data storage, color-selective tomographic imaging, and super-resolving confocal microscopy; interferometric surface characterization; and adaptive micro-opto-mechanics. Optical MEMS.  

 

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M. Bazant

Research focuses on transport phenomena in materials and engineering systems, especially diffusion coupled to fluid flow. My group is currently studying granular flow in pebble-bed nuclear reactors, nonlinear electrokinetic flows in microfludic devices, ion transport in thin-film lithium batteries, and advection-diffusion-limited aggregation.  
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S. Bhatia

Research focuses on applications of micro- and nanotechnology to tissue repair and regeneration. Emphasis on development of microfabrication tools to improve cellular therapies for liver disease, living cell arrays to study stem cell biology, and nanoparticles for cancer diagnosis and treatment.  

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D. Boning

Semiconductor manufacturing. Modeling and control of chemical mechanical polishing. Variation modeling and reduction in fabrication processes, devices, and interconnects. Run by run and feedback control for quality and environment in semiconductor fabrication. Software systems for distributed and collaborative computer aided design and fabrication.  

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A.P. Chandrakasan

Design of digital integrated circuits and systems. Emphasis on the energy efficient implementation of distributed microsensor and signal processing systems. Protocols and Algorithms for Wireless Systems. Circuits techniques for deep sub-micron technologies.  

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G. Chen

Micro- and nanoscale heat transfer and energy conversion with applications in thermoelectrics, photonics, and microelectronics; nano-mechanical devices and micro-electro-mechanical systems; radiation and electromagnetic metamaterials.  

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M. Culpepper

Research focuses on precision interfaces, precision manufacturing, design for manufacturing, applying precision principles as enabling technologies in multi-disciplinary product design: electronic test equipment, automotive systems, precision compliant mechanisms.
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L. Daniel

Research focuses on engineering design applications to drive research in simulation and optimization algorithms and software, design of microfabricated inductors.  

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P. Doyle

Understanding the dynamics of single polymers and biomolecules under forces and fields; lab-on-chip separations, polymer rheology. DNA electrophoresis in microdevices. Superparamagnetic colloids. Brownian Dynamics simulations of complex molecules. Microheology of biopolymers.

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A. Epstein

Smart engines, turbine heat transfer and aerodynamics, advanced diagnostic instrumentation, turbomachinery noise, environmental impact of aircraft.  

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D. Freeman

Biological micromechanics, MEMS, light microscopy and computer microvision.

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M. Gray

Microfabricated devices for use in diagnostic medicine and biological research. Particle and fuid analysis of flowing media using absorbance and fluorescence techniques as a means for understanding cell or organism metabolism and phenotypic expression.

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J. Han

BioMEMS, biomolecule analysis, micro/nanofluidics, micro-analysis systems.  

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J. Jacobson

Development of processes for directly and continuously printing communication, computation, and displays onto arbitrary substrates. Electronic control of biomolecules.

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K. Jensen

Microfabrication and characterization of devices and systems for chemical synthesis and detection, hydrocarbon fuel conversion to electrical energy, bioprocessing and bioanalytics. Multiscale simulation of transport and reaction processes. Chemical vapor deposition of polymer, metal, and semiconductor thin films. Synthesis and characterization of quantum dot composite materials. 

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R. Kamm
Cell and molecular mechanics; microfluidic systems for angiogenesis, cell migration, and other tissue engineering applications; computational models for the control of multi-cell, coordinated behavior.
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R. Karnik

Micro- and nanofluidic systems. Application of transport phenomena in nanofluidics for flow control, separation, sensing. Microfluidic devices for studying chemical kinetics and nanoparticle synthesis.

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A. Khademhosseini

Micro- and nanofluidic systems.  Application for controlling cell microenvironment and to use these techniques to regulate stem cell fate decisions.

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     Publications List                    

     Academic CV

S.G. Kim

Systems Design and Manufacturing, MEMS for optical beam steering, microphotonic packaging and active alignment, micro power generation, massive parallel positional assembly of nanostructures, and nano actuator array.  

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J.H. Lang

Analysis, design and control of electromechanical systems. Application to traditional electromagnetic actuators, micron scale actuators and sensors, and flexible structures.  

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S. Manalis

Application of micro- and nanofabrication technologies towards the development of novel methods for probing biological systems. Current projects focus on electrical and mechanical detection schemes for analyzing DNA, proteins, and cells.  

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D.J. Perreault

Analysis, design, and control of cellular power converter architectures. DC/DC Converters for dual-voltage electrical systems. Electrical system transient investigation. Exploration of non-conventional electricity sources for motor vehicles.

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M.A. Schmidt

MicroElectroMechanical Systems (MEMS). Microfabrication technologies for integrated circuits, sensors, and actuators. Design of microsensor and microactuator systems.  

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A. Slocum

Precision Engineering; Machine Design; Product Design.  

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C.V. Thompson

Processing, structure, properties, performance, and reliability of thin films and structures for micro- and nano-devices and systems. Reliability and Interconnect. 

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T. Thorsen

Integrating microfluidic design and fabrication techniques, electronics and optics with biochemical applications. Optimizing channel dimensions, geometry, and layout to generate 3-D fluidic networks that are functional and scalable. Interface development to combine microfluidic technologies with pneumatic valves, MEMS-based detector systems, and software-based data acquisition and interpretation, creating devices for fundamental research and diagnostic applications.  

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H.L. Tuller

Characterize and understand key electronic, microstructural, and optical properties of advanced ceramic materials. Fabrication and
characterization of crystals, ceramics and glasses for electronic devices, lasers, electrochemical energy conversion, sensors and actuators.  

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J. Voldman

Biological applications of microsystem technology. Engineering and use of microsystems for analysis and engineering of single cells. Physical and electrical cell manipulation. Design, modeling, microfabrication, and testing of microfluidic biological devices employing unconventional materials and fabrication processes. Electromechanics at the microscale.  

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E. N. Wang

Development of MEMS/NEMS for: Biochemical sensing and detection; Thermal management of high power density and high performance systems; Diagnostics for biological systems and bio-functionality

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B. Wardle

Power MEMS microyhydraulics, structural health monitoring, nanocomposites, damage resistance/tolerance of advanced composite materials, cost modeling in the structural design process, conversion of technology to value.  

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D. Weinstein

Hybrid MEMS-IC devices for low-power wireless communication, microprocessor clocking, and sensor applications. In particular, we are working to harness the benefits of acoustic vibrations to enhance the performance of next-generation electron devices.

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J. White

Theoretical and practical aspects of numberical algorithms for problems in circuit, device, interconnect, packaging, and micromechanical system design; parallel numerical algorithms; interaction between numerical algorithms and computer architecture.  

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M.F. Yanik
Development and applications of technologies for studying cellular processes;application of photonic nanostructures for bio-sensing, nanomanipulation, and bio-spectroscopy usage.

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Image credits:

A.J. Hart

B. Blackwell

H. Taylor

K. Deshpande