MTL Annual Report 2002

The 2002 MTL Annual Report is available for download in portable document format (PDF).

We also have PDFs of each major research section available for download.

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MTL Annual Report 2002

Individual Research Sections by Topic:
Microelectromechanical Systems

• Wafer Bond Alignment and Strength Characterization
• Microfabricated Cell Analysis Device
• Development of Monolithic Biomolecule Analysis Device
• A Robust Microfabricated Field-effect Sensor for Monitoring Molecular Adsorption in Liquids
• A Vacuum- Bonding Process for Packaging of High Temperature
• Microreactors
• Microfabricated Fluidic Devices for Cell Lysis and Subcellular Component Separations
• Microelectromechanical Thin Film Stress Sensors
• Tunable Lenses
• Electrostatically Tunable Diffractive Lenses
• Analog Tunable Gratings - A Piezoelectric Implementation with Nanometer Deformation
• Vibration-To-Electric Energy Conversion
• MEM Analog Tunable Gratings by Electrostatic Actuation
• The Polychromator: A MEMS Correlation Spectrometer
• Power MEMS Materials and Structures
• Micro Electric Machines for Micro Turbomachinery
• A Micromachined Valve for Power MEMS
• Reliability of MEMS Devices in Shock Environments
• Micro Magnetic Machines for Micro Turbomachinery
• Design and Characterization of Robust Hot Film Sensors for Tactical Aircraft Inlets
• Sub-10 cm3 Interferometric Accelerometer with Nano-g Resolution
• Wafer Bonding Technologies
• Development of Hydrocarbon-Fueled Silicon Combustors for Micro Gas Turbine Engines
• Bistable Micro Relays
• CAD for Microelectromechanical Systems
• MicroChemical Systems-Multiphase Reactions
• Microreactors for Catalyst Testing
• MicroChemical Systems for Direct Fluorination of Aromatics
• Thermophotovoltaic Generation of Electricity in MicroFuel Converters
• MicroChemical Systems for Separations
• Fuel Processing in Microfabricated Chemical Systems
• Precision Passive Mechanical Alignment of Wafers
• Platforms for Rapid Screening and Analysis of Biological and Chemical Processes
• Microchemical Systems for Fuel Processing and Conversion to Electrical Power
• Micromachined Rocket Engines

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