MIT Statistical Metrology Group
Research Results
CMP Mask Sets and Models
- CMP Characterization Mask Set
- CMP Characterization Mask Set for STI Applications
- CMP Modeling Scripts
Group Members
- Prof. Duane Boning
- Hong Cai
- Nigel Drego
- Karen Gonzalez-Valentin
- Xiaolin Xie
- Graduated students: Dennis Maung, Eric Chang,
Rajesh Divecha, Brian Stine, Jung Yoon,
Dennis Ouma, Terence Gan, Charles Oji,
Shiou Lin Sam, Taber Smith, Vikas Mehrotra,
Brian Lee, Tae Park, Tamba Tugbawa
Maintained by
Duane Boning
Last updated June 21, 2002 (Duane Boning)
Copyright © 1996-2002 by Massachusetts Institute of Technology.
All rights reserved.