MIT Statistical Metrology Group -- Theses

Last updated August 20, 2007.

Hong Cai, "Modeling of Pattern Dependencies in the Fabrication of Multilevel Copper Metallization," Ph.D. Thesis, MIT Dept. of Materials Science and Engineering, June 2007. | pdf
Karen Gonzalez-Valentin Gettings, "Study of CMOS Process Variation by Multiplexing Analog Characteristics," Ph.D. Thesis, MIT Dept. of Electronical Engineering and Computer Science, June 2007. | pdf
Xiaolin Xie, "Physical Understanding and Modeling of Chemical Mechanical Planarization in Dielectric Materials," Ph.D. Thesis, MIT Dept. of Physics, June 2007. | pdf

Kwaku O. Abrokwah, "Characterization and Modeling of Plasma Etch Pattern Dependencies in Integrated Circuits," M.Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2006. | pdf
Karthik Balakrishnan, "Analysis of Variation in On-Chip Waveguide Distribution Schemes and Optical Receiver Circuits," S.M. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2006. | pdf

Mehdi Gazor, "Design for Manufacturability with Regular Fabrics in Digital Integrated Circuits," S.M. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2005. | pdf

Brian Tang, "Characterization and Modeling of Polysilicon MEMS Chemical-Mechanical Polishing," M.Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2004. | pdf
Tyrone Hill, "Analysis of DRIE Uniformity for Microelectromechanical Systems," S.M. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2004. | pdf

Nigel Drego, "A Low-Skew, Low-Jitter Receiver Circuit for On-Chip Optical Clock Distribution," S.M. Thesis, MIT Dept. of Electrical Engineering and Computer Science, June 2003. | pdf (5.8Mb)

Brian Lee, "Modeling of Chemical Mechanical Polishing for Shallow Trench Isolation," Ph.D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (1.7Mb)
Tae Hong Park, "Characterization and Modeling of Pattern Dependencies in Copper Interconnects for Integrated Circuits," Ph.D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (1.7Mb)
Tamba E. Gbondo-Tugbawa, "Chip-Scale Modeling of Pattern Dependencies in Copper Chemical Mechanical Polishing Processes," Ph.D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (2.1Mb)
Brian E. Goodlin, "Multivariate Endpoint Detection of Plasma Etching Processes," Ph.D. Thesis, MIT Dept. of Chemical Engineering, May 2002. | pdf (9.9Mb)
Joseph S. Panganiban, "A Ring Oscillator Based Variation Test Chip," M.Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (2Mb)
Karen M. Gonzalez-Valentin, "Extraction of Variation Sources Due to Layout Practices," S.M. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (260Kb)
Michael J. Mills, "Variation Aware Design of Data Receiver Circuits for On-Chip Optical Interconnect," M.Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2002. | pdf (1Mb)

David White, "Multivariate Analysis of Spectral Measurements for the Characterization of Semiconductor Processes," Ph. D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, August 2001. | pdf (8Mb)
Aaron E. Gower-Hall, "Integrated Model-Based Run-to-Run Uniformity Control for Epitaxial Silicon Deposition," Ph. D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, September 2001. | pdf (2.6Mb)
Allan Lum, "An On Chip Low Skew Optical Clock Receiver," M. Eng., Thesis, MIT Dept. of Electrical Engineering and Computer Science, August 2001. | postscript (18Mb) | pdf (836K)
Kuang Han Chen, "Data-Rich Multivariate Detection and Diagnosis Using Eigenspace Analysis," Ph. D. Thesis, MIT Dept. of Aeronautics and Astronautics, June 2001. | pdf
Vikas Mehrotra, "Modeling the Effects of Systematic Process Variation on Circuit Performance," Ph. D. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2001. | postscript (17Mb) | pdf (3Mb)

Terence Gan, "Modeling of Chemical-Mechanical Polishing for Shallow Trench Isolation," M. Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2000. | postscript (3Mb) | pdf (425Kb)
Shiou Lin Sam, "Characterization of Optical Interconnects," M. S. Thesis, MIT Dept. of Electrical Engineering and Computer Science, May 2000. | postscript (16.7Mb) | pdf (1.4Mb)
Radhika Dutt, "Modeling of Chemical Mechanical Polishing Using Fixed Abrasive Technology," M. Eng. Thesis, MIT Dept. of Electrical Engineering and Computer Science, October 2000. | pdf (9.7Mb)

Taber H. Smith, "Device Independent Process Control of Dielectric Chemical Mechanical Polishing," MIT Dept. of Electrical Engineering and Computer Science, September 1999. | pdf (1.7Mb)

Dennis Okumu Ouma, "Modeling of Chemical Mechanical Polishing for Dielectric Planarization," MIT Dept. of Electrical Engineering and Computer Science, November 1998. | pdf (10Mb)

Brian Stine, "A General Methodology for Assessing and Characterizing Variation in Semiconductor Manufacturing," MIT Dept. of Electrical Engineering and Computer Science, 1997. | ps (7.2Mb) | pdf (3Mb)