$ SuperHalo NanoMOSFET assign name=pdope n.val=2e20 assign name=bdope n.val=1e15 $ physical dimensions assign name=Lsd n.val=0.0575 assign name=Lgate n.val=0.085 assign name=conlen n.val=0.010 assign name=Tpoly n.val=0.060 assign name=Tox n.val=0.0020 assign name=Tsi n.val=0.120 $ tags assign name=xmin n.val=-@Lsd-@Lgate/2 assign name=xmax n.val=@Lsd+@Lgate/2 assign name=ymin n.val=-@Tox-@Tpoly assign name=ymax n.val=@Tsi $ ************************************************************* $ MESH smooth=1 $ lateral mesh x.mesh x.min=@xmin width=@Lsd h1=@Lsd/15 h2=@Lsd/28 x.mesh width=@Lgate h1=@Lgate/42 h2=@Lgate/42 x.mesh width=@Lsd h1=@Lsd/28 h2=@Lsd/15 $ depth mesh y.mesh y.min=@ymin depth=@Tpoly h1=@Tpoly/3 h2=@Tox/2 y.mesh depth=@Tox h1=@Tox/2 y.mesh depth=@Tsi/2 h1=@Tox/2 h2=@Tsi/60 y.mesh y.max=@ymax h1=@Tsi/60 h2=@Tsi/20 $ un-grid eliminate columns + x.min=@xmin x.max=-@Lgate/2 y.min=@ymin y.max=-@Tox eliminate columns + x.min=@Lgate/2 x.max=@xmax y.min=@ymin y.max=-@Tox $ ************************************************************* $ $ left oxide region num=1 oxide x.min=@xmin x.max=-@Lgate/2 y.min=@ymin y.max=-@Tox $ gate polysilicon region num=2 silicon x.min=-@Lgate/2 x.max=@Lgate/2 y.min=@ymin y.max=-@Tox $ right oxide region num=3 oxide x.min=@Lgate/2 x.max=@xmax y.min=@ymin y.max=-@Tox $ gate oxide region num=4 oxide x.min=@xmin x.max=@xmax y.min=-@Tox y.max=0 $ bulk silicon region num=5 silicon x.min=@xmin x.max=@xmax y.min=0 y.max=@ymax $ ************************************************************* $ $ contacts electrode name=drain x.min=@xmax x.max=@xmax y.min=0 y.max=@conlen electrode name=gate x.min=-@Lgate/2 x.max=@Lgate/2 + y.min=@ymin y.max=@ymin+@conlen electrode name=source x.min=@xmin x.max=@xmin y.min=0 y.max=@conlen electrode name=bulk bottom $ ************************************************************* $ $ poly depletion profile n-type uniform n.peak=@pdope region=2 $ background doping profile p-type uniform n.peak=@bdope region=5 $ SuperHalo 2D doping PROFILE region=5 in.file=sh.doping 2d.ascii x.col=1 y.col=2 n.col=3 + y.min=0 y.max=@Tsi x.min=@xmin x.max=@xmax $plot.2d grid boundary fill $ ************************************************************* $ contact name=drain neutral resistance=0 contact name=gate n.polysi resistance=0 contact name=source neutral resistance=0 contact name=bulk neutral resistance=0 $ models models lsmmob fldmob bgn fermidir $ with QM + qm.phili qm.method=1 qm.efield=1 qm.norp=-1 $ calibrated mobility mobility silicon betan=1.250673 vsatn=9.843950e6 $ ------------------------------------------------------------- $ $ bias contacts assign name=Vsource n.val=0 assign name=Vbulk n.val=0 assign name=VGstart n.val=0 assign name=VGstep n.val=0.1 $ loop Vdrain loop steps=3 assign name=Vdrain n.val=(0.1 0.7 1.2) assign name=Vgate n.val=@VGstart $ initial solution use Gummel symbolic gummel carriers=1 electrons method iccg damped itlimit=40 solve V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk symbolic newton carriers=1 electrons method autonr n.damp solve V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk $ begin log file of IdVg log out.file="ivd"@Vdrain $ loop for Vgate loop steps=13 solve V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk $ increment assign name=Vgate n.val=@Vgate+@VGstep $ end Vgate loop and close l.end log close $ end Vdrain loop l.end