$ SuperHalo NMOSFET


assign	name=pdope	n.val=3e20
assign	name=bdope	n.val=1e17

$ physical dimensions
assign	name=Lgate	n.val=0.009
assign	name=Lspace	n.val=0.005
assign	name=Lsd	n.val=0.010

assign	name=Tgate	n.val=0.020
assign	name=Tox	n.val=0.00093
assign	name=Tsi	n.val=0.100

$ tags
assign	name=xmax	n.val=@Lgate/2+@Lspace+@Lsd
assign	name=xmin	n.val=-@xmax
assign	name=xedge	n.val=@Lgate/2+@Lspace
assign	name=ymin	n.val=-@Tox-@Tgate
assign	name=ymax	n.val=@Tsi

$ ************************************************************* $

mesh RECTANGU smooth.k=1

$ lateral mesh
x.mesh	x.min=@xmin width=@Lsd h1=@Lsd/5 h2=@Lsd/10
x.mesh	width=@Lspace h1=@Lsd/10 h2=@Lgate/40
x.mesh	width=@Lgate/2 h1=@Lgate/40 h2=@Lgate/30
x.mesh	width=@Lgate/2 h1=@Lgate/30 h2=@Lgate/40
x.mesh	width=@Lspace h1=@Lgate/40 h2=@Lsd/10
x.mesh	width=@Lsd h1=@Lsd/10 h2=@Lsd/5

$ depth mesh
y.mesh	y.min=@ymin depth=@Tgate h1=@Tgate/4 h2=@Tox/3
y.mesh	depth=@Tox h1=@Tox/3 h2=@Tox/3
y.mesh	depth=@Tsi/5 h1=@Tox/3 h2=@Tsi/50
y.mesh	y.max=@ymax h1=@Tsi/50 h2=@Tsi/10

$ un-grid
eliminate	columns
+	x.min=@xmin x.max=-@Lgate/2 y.min=@ymin y.max=-@Tox
eliminate	columns
+	x.min=@Lgate/2 x.max=@xmax y.min=@ymin y.max=-@Tox

eliminate	columns
+	x.min=@xmin x.max=@xmax y.min=@ymax/2 y.max=@ymax

$ ************************************************************* $

$ left oxide
region	num=4 oxide	x.min=@xmin x.max=-@xedge y.min=@ymin y.max=-@Tox

$ right oxide
region	num=5 oxide	x.min=@xedge x.max=@xmax y.min=@ymin y.max=-@Tox

$ top gate and spacers
region	num=1 silicon x.min=-@Lgate/2 x.max=@Lgate/2 y.min=@ymin y.max=-@Tox
region	num=14 oxide
+	x.min=-@xedge x.max=-@Lgate/2 y.min=@ymin y.max=-@Tox
region	num=15 oxide
+	x.min=@Lgate/2 x.max=@xedge y.min=@ymin y.max=-@Tox

$ gate oxide
region	num=31 oxide	x.min=@xmin x.max=@xmax y.min=-@Tox y.max=0

$ bulk silicon
region	num=3 silicon	x.min=@xmin x.max=@xmax y.min=0 y.max=@ymax

$ ************************************************************* $

$ contacts
electrode name=drain	x.min=@xedge x.max=@xmax y.min=0 y.max=0

electrode name=gate	x.min=-@Lgate/2 x.max=@Lgate/2 y.min=@ymin y.max=-@Tox

electrode name=source	x.min=@xmin x.max=-@xedge y.min=0 y.max=0

electrode name=bulk	bottom

$ ************************************************************* $

profile	n-type region=1 uniform n.peak=@pdope

$ background doping
profile p-type region=3 uniform n.peak=@bdope

profile n-type	n.peak=2.00e20 region=3
+	y.min=0 y.max=0 y.char=0.009
+	x.min=@xmin x.max=-@Lgate/2 x.char=0.00067

profile n-type	n.peak=2.00e20 region=3
+	y.min=0 y.max=0 y.char=0.009
+	x.min=@Lgate/2 x.max=@xmax x.char=0.00067

profile p-type	n.peak=8.00e19 region=3
+	y.min=0.010 y.max=0.010 y.char=0.009
+	x.min=@xmin x.max=-@Lgate/2+.001 x.char=0.00133

profile p-type	n.peak=8.00e19 region=3
+	y.min=0.010 y.max=0.010 y.char=0.009
+	x.min=@Lgate/2-.001 x.max=@xmax x.char=0.00133

$ ************************************************************* $

contact	name=gate	n.polysi resistan=0
contact	name=bulk	neutral resistance=0


$ models
models gmcmob tmpmob ef.tmp auger
+ fermidir bgn
$+ qm.phili qm.method=1 qm.efield=1 qm.norp=-2
$ with QM

$ transport
mobility silicon betan=1.25 vsatn=0.95e7
+ bn.gmc=0 cn.gmc=8.36e6 dn.gmc=1.5e14 d2n.gmc=2.85e11

material silicon ele.tauw=0.10e-12

$ ------------------------------------------------------------- $

$ bias contacts
assign	name=Vsource	n.val=0
assign	name=Vbulk	n.val=0

assign	name=VGstart	n.val=0
assign	name=VGstep	n.val=0.1

$ loop Vdrain
loop	steps=3
assign	name=Vdrain	n.val=(0.1 0.4 1)

assign	name=Vgate	n.val=@VGstart

contact	name=drain	neutral resistance=0
contact	name=source	neutral resistance=0

$ initial solution use Gummel
symbolic gummel carriers=1 electrons ele.temp
method	iccg damped itlimit=40
solve	V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk

contact	name=drain	neutral resistance=13
contact	name=source	neutral resistance=13

symbolic newton carriers=1 electrons ele.temp coup.ele
method	autonr n.damp
solve	V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk

$ begin log file of IdVg
log	out.file="IVeb.d"@Vdrain

$ loop for Vgate
loop	steps=11

solve	V(drain)=@Vdrain V(gate)=@Vgate V(source)=@Vsource V(bulk)=@Vbulk

$ increment
assign	name=Vgate	n.val=@Vgate+@VGstep

$ end Vgate loop and close
l.end

log	close

l.end

$ ------------------------------------------------------------- $