== MIT ==
What and Who?
Topics of Discussions
Schedule
Links

 
MEMS/NEMS News:
Smalltimes.com
NanoApex (Science)
NanoApex(Business)
Silicon Strategies(Business)
MEMS Clearinghouse
National Nanotechnology Initiative
Fabrication:
Foundry
MEMS Exchange
XFab
Wafers Vendor
Silicon Quest (SOI)
Corning (pyrex)
Masks (Transparency)
Pageworks
Photoplotstore
Masks (Chrome)
Advance Reproductions Corp.
Process
Berkeley Etch Rate Database
Material Properties:
6.777 Material Page
MEMS Clearinghouse
Berkeley's folded Si
Conference Papers:
Hilton Head 2002
MEMS 2002
MEMS 2003
MEMS 2004
Transducers'03
Journals:
IEEE
Sensors and Actuators
Nature
Links to MEMS Research Labs:
MTL, MIT
BSAC, Berkeley
Solid-State Electronics Lab, U of Michigan
Microstructures and Sensors Lab, Stanford
Center for MEMS and Microsystems Technologies (CMMT), Georgia Tech
 
If you'd like to post your links, please email Xue'en.