List of past discussions of MEMSalon

	== MIT ==
What and Who?	Topics of Discussions	Schedule	Links

Fall 2002

Date Host Topic Paper References Affiliations Web Access*

09/03/02 Jason Kralj Power MEMS

Zhang, et al. Transducers '01, Eurosensors XV

Arana, et al. IEEE MEMS Converence. Jan 20-24 2002. Las Vegas NV

Article

Article

09/12/02 Xue'en Yang RF MEMS

Z. Feng, H. Zhang, W. Zhang, B. Su, K. C. Gupta, V. M. Bright, and Y.C.Lee, "MEMS-Based variable Capacitor for Milimeter-Wave Applications," Proceedings of the 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 255-258, June 4-8, 2000.

K. F. Harsh, W. Zhang, V. M. Bright, and Y. C. Lee, "Flip-Chip Assembly for Si-Based RF MEMS," Proceedings of the 12th IEEE International Conference on Microelectromechanical Systems (MEMS `99), Orlando, FL, January 17-21, 1999, pp. 273-278.

Prof. Y.C.Lee at University of Colorado at Boulder http://mems.colorado.edu
/c1.res.pub/c2.ftp
/HILTON2000_Feng.pdf

http://me-www.colorado.edu
/centers/yclee-group/papers
/ftp/IEEE99_Harsh.pdf

09/30/02 Stan Jurga Quasi-three-dimensional MEMS structures and assembly

3-D micro-structures folded by lorentz force.

Plastic deformation magnetic assembly (PDMA) of 3D microstructure: technology development and application.

Uthara Srinivasan, Dorian Liepmann, and Roger T. Howe, Microstructure to Substrate Self-Assembly Using Capillary Forces, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 1, MARCH 2001

Article

Article

Article

10/07/02 Nicholas Conway Application of physical/mechanical assembly

R. Edwin Oosterbroek, J. W. (Erwin) Berenschot, et al. Etching Methodologies in 111 -Oriented

Silicon Wafers. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000
Parrallel Microassembly with Electrostatic Fields.

Stephen J. Ralis, Barmeshwar Vikramaditya, and Bradley J. Nelson. Micropositioning of a Weakly Calibrated Microassembly System Using Coarse-to-Fine Visual Servoing Strategies. IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, VOL. 23, NO. 2, APRIL 2000

Karl Friedrich Böhringer,Bruce Randall Donald, et al. Part Orientation with One or Two Stable Equilibria

Using Programmable Force Fields, IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, VOL. 16, NO. 2, APRIL 2000
Kazuhiro Saitou, Dung-An Wang, and Soungjin J. Wou, Externally Resonated Linear Microvibromotor

for Microassembly, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000
Article

Article

Article

Article

Article

10/28/02 Emily Cooper Interfacing to cells

Meyer, et. al "Biomedical Microdevices for Neural Interfaces." proceedings IEEE special topic conference on microtechnolgies in med. and bio. p447 2000.

Grattarola and Martinoia, "Modeling the Neuron-Microtransducer Junction: From Extracellular to Patch Recording." IEEE Trans. Biomed. eng. 40 p35 (1993).

Article

Article

11/05/02 Norihisa Miki Drup Delivery

.T. Santini, Jr., M.J. Cima, R. Langer,

"A Controlled Release Microchip," Nature, Vol. 397, pp. 335-338, Jan 28, 1999
D. Maillefer, S. Gamper, B. Frehner, P. Balmer, H. van Lintel, and P. Renaud, "A High-performance Silicon Micropump for Disposable Drug Delivery Systems," IEEE MEMS2001, pp413-417.

S. Sershen, J. West, "Implantable, polymeric systems for modulated drug delivery ," Advanced Drug Delivery Reviews 54 (2002) pp.1225-1235.

Article

Article

Article

11/26/02 Kevin Turner fabrication and use of
piezoresistive cantilevers to measure small forces

Chui et al., Applied Physics Letters, 72(11) p.1388-90 (1998)

Liang et al. Hilton Head 2000, p. 33-8 (2000)

Autumn et al, PNAS, Sep 17, 2002

Article
Article
Article

12/09/02 Hang Lu Fabrication of wearable electronics

Rogers, J.A. et al. Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks. PNAS, April 24, 2001, vol. 98, no. 9 pp 4835–4840

Loo, Y.L. et al. Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics. APPLIED PHYSICS LETTERS VOLUME 81, NUMBER 3, pp 562-564.

Loo, Y.L. et al. Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination. PNAS, August 6, 2002, vol. 99, no. 16, pp 10252–10256

Article

Article

Article

Summer 2002

Date Host Topic Paper Reference Affiliations Web Access

07/03/02 Emily Cooper Direct imprint of nanostructure

Stephen Chou, Chris Keimel, Jian Gu,"Ultrafast and Direct Imprint of Nanostructures in Silicon" Nature, 417, 835-837 (June 2002).

Chou. et al. "Impring Lithography with 25-Nanometer Resolution." Science 272 p85 (1996).

Stephen Chou, Princeton U. Article

Article

07/10/02 Xue'en Yang HARPSS Process; Mechanical resonator

Farrokh Ayazi, Khalil Najafi. High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000

Seong Yoel No, Akinori Hashimura, Siavash Pourkamali, Farrokh Ayazi. Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing. Solid-State Sensor, Actuator, and Microsystems Workshop. Hilton Head Island, SC. June 2-6, 2002. pp281-284

Khalil Najafi, U of Michigan, Ann Arbor
(Farrokh Ayazi is now a professor of George Tech.)
http://users.ece.gatech.edu/
~ayazi/pub/JMEMS_
HARPSS.pdf

http://pergatory.mit.edu/
hh2002/papers/paper71.pdf

07/17/02 Kevin Turner SU8

V. Seidemann et al. ' Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers' Sensors and Actuators, v. A97-98, p. 457-61 (2002).

K. Y. Lee et al. ' Micromachining applications of a high resolution ultrathick photoresist' J. Vac. Sci. Tech. B, v.13(6), p. 3012-16 (1995).

Article

Article

07/24/02 Thomas Burg 3D structures

Jae Wan Kwon, Eun Sok Kim. Multi-level microfluidic channel routing with protected convex corners. Sensors and Actuators A 97-98 (2002) 729-733, pp 729-733

V.G. Kutchoukov, J.R. Mollinger, A. Bossche. New photoresist coating method for 3-D structured wafers. Sensors and Actuators 85 (2000) pp 377-383

Nobuo Takeda. Ball semiconductor technology and its application to MEMS. proceedings of MEMS 2000, p11-16, 2000

Article

Article

Article

07/31/02 Maxim Shusteff pumps and valves for microfluidics

Alex Terray, John Oakey, David W. M. Marr. Microfluidic Control Using Colloidal Devices. Science Vol 296, 7 June 2002. pp 1841-1844.

Hou-Pu Chou, Marc A. Unger, Stephen R. Quake. A Microfabricated Rotary Pump. Biomedical Microdevices 3:4, 323-330, 2001. pp323-329.

P. Fredrik Pettersson, Edwin W. H. Jager, Olle Inganas. Surface Micromachined Polymer Actuators as Valves in PDMS Microfuidic System. 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, October 12-14, 2000, Lyon, France. pp334-335.

W K Schomburg, J Fahrenberg, D Maas and R Rapp. Active valves and pumps for microfluidics. J. Micromech. Microeng. 3 (1993) 216-218.

Quake group at Caltech

Article

Article

Article

Article

08/07/02 Hang Lu Nanosensors and molecular lithography

Cui Y, Wei QQ, Park HK, et al. Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species SCIENCE 293 (5533): 1289-1292 AUG 17 2001

Keren K, Krueger M, Gilad R, et al. Sequence-specific molecular lithography on single DNA molecules SCIENCE 297 (5578): 72-75 JUL 5 2002

Huang Y, Duan XF, Wei QQ, et al. Directed assembly of one-dimensional nanostructures into functional networks SCIENCE 291 (5504): 630-633 JAN 26 2001

Article

Article

Article

08/14/02 Norihisa Miki Hybrid living/non-living systems

T. Aytur, P.R. Beatty, B. Boser, M. Anwar, and T. Ishikawa,

"An Immunoassay Platform Based on CMOS Hall Sensors,"
in Proc. HH2002, pp.126-129
M.M.Miller, P.E.Sheehan, R.L. Edelstein, C.R. Tamanaha, L.Zhong, S. Bounnak, L.J.Whitman, R.J. Colton,

"A DNA array sensor utilizing magnetic microbeads and magnetoelectronic detection," Journal of Magnetism and Magnetic Materials 225 (2001) 138-144.
"The Art and Science of Engineering Hybrid Living/Non-living Mechanical Devices" in Proc. MEMS2002, pp.1-5.

Article

Article

Article

08/21/02 Hongwei Sun Micro needles

Yael Hanein, U. Lang, J. Theobald etc., " Intracellular Neuronal Recording with High Aspect Ratio MEMS Probes", Transducers 2001, page386-389.

Devin McAllister, Mark Allen, Mark Prausnitz, "

Microfabricated Microneeldes for Gene and Drug Delivery", Annual Review of Biomedical Engineering, 2000, 02: pp289-313.
Nicolas Sillon and Robert Baptist, "Micromachined Mass

Spectrometer", Transducers 2001, page788-791.
Article

Article

Article

Spring 2002 (Incomplete)

Date Host Topic Paper References Affiliations Web Access*

01/24/02 Hang Lu Gas Sensors

C. Hagleitner, A. Hierlemann, D. lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes, ETH. "Smart single-chip gas sensor microsystem" Nature, Vol 414, pp293, Nov 15 2001

Martin Heule and Ludwig J.Gauckler, ETH. "Gas Sensors Fabricated from Ceramic Suspensions by Micromolding in Capillaries". Advanced Materials, no.23, pp1791, December 3 2001

02/07/02 Emily Cooper Chaotic mixer;
Serpentine mixer

A.D. Stroock, et. al. "Chaotic Mixer for Microchannels" Science 295 p647 (25 January 2002)

Liu, et. al. "Passive Mixing in a Three-Dimensional Serpentine Microchannel." J. MEMS 9 p190 (June 2000).

http://www.sciencemag.org

http://ieeexplore.ieee.org

02/21/02 Xue'en Yang Biomolecular motor

C. D. Montemagno, H. Neves, The art and science of engineering hybrid living/non-living mechanical devices, MEMS 2002

R. K. Soong, G. D. Bachand, H. P. Neves, et al. Powering an Inorganic Nanodevice with a Biomolecular Motor. Science, Vol 290, 24 Nov. 2000, pp 1555

Carlo Montemagno, UCLA Article

Article

Andrea Zanzotto

Hongy Yu and Eun Sok, "Noninvasive Acoustic-Wave microfluidic Driver", MEMS 02

Yoonsu Choi, Kieun Kim, and Mark G. Allen, "Coutinuously-varying, three-diensional SU-8 Structures: Fabrication of Inclined Magnetic Actuators"

Kim, U. Southern California

Georgia Tech

05/16/02 Kevin Turner Electro-osmotic pumps

S. Zheng, et al. 'Fabrication and Characterization of electroosmotic micropumps,' Sensors and Actuators B, v.79, p.107-114 (2001).

S. Mutlu, et al. 'Micromachined porous polymer for bubble free electro-osmotic pump', MEMS 2002.

Article

Article

* You would need our password to access the specific articles. Please email Hang for the password.

Date	Host	Topic	Paper References	Affiliations	Web Access*
09/03/02	Jason Kralj	Power MEMS	Zhang, et al. Transducers '01, Eurosensors XV Arana, et al. IEEE MEMS Converence. Jan 20-24 2002. Las Vegas NV		Article Article
09/12/02	Xue'en Yang	RF MEMS	Z. Feng, H. Zhang, W. Zhang, B. Su, K. C. Gupta, V. M. Bright, and Y.C.Lee, "MEMS-Based variable Capacitor for Milimeter-Wave Applications," Proceedings of the 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 255-258, June 4-8, 2000. K. F. Harsh, W. Zhang, V. M. Bright, and Y. C. Lee, "Flip-Chip Assembly for Si-Based RF MEMS," Proceedings of the 12th IEEE International Conference on Microelectromechanical Systems (MEMS `99), Orlando, FL, January 17-21, 1999, pp. 273-278.	Prof. Y.C.Lee at University of Colorado at Boulder	http://mems.colorado.edu /c1.res.pub/c2.ftp /HILTON2000_Feng.pdf http://me-www.colorado.edu /centers/yclee-group/papers /ftp/IEEE99_Harsh.pdf
09/30/02	Stan Jurga	Quasi-three-dimensional MEMS structures and assembly	3-D micro-structures folded by lorentz force. Plastic deformation magnetic assembly (PDMA) of 3D microstructure: technology development and application. Uthara Srinivasan, Dorian Liepmann, and Roger T. Howe, Microstructure to Substrate Self-Assembly Using Capillary Forces, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 1, MARCH 2001		Article Article Article
10/07/02	Nicholas Conway	Application of physical/mechanical assembly	R. Edwin Oosterbroek, J. W. (Erwin) Berenschot, et al. Etching Methodologies in 111 -Oriented Silicon Wafers. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000 Parrallel Microassembly with Electrostatic Fields. Stephen J. Ralis, Barmeshwar Vikramaditya, and Bradley J. Nelson. Micropositioning of a Weakly Calibrated Microassembly System Using Coarse-to-Fine Visual Servoing Strategies. IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, VOL. 23, NO. 2, APRIL 2000 Karl Friedrich Böhringer,Bruce Randall Donald, et al. Part Orientation with One or Two Stable Equilibria Using Programmable Force Fields, IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, VOL. 16, NO. 2, APRIL 2000 Kazuhiro Saitou, Dung-An Wang, and Soungjin J. Wou, Externally Resonated Linear Microvibromotor for Microassembly, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000		Article Article Article Article Article
10/28/02	Emily Cooper	Interfacing to cells	Meyer, et. al "Biomedical Microdevices for Neural Interfaces." proceedings IEEE special topic conference on microtechnolgies in med. and bio. p447 2000. Grattarola and Martinoia, "Modeling the Neuron-Microtransducer Junction: From Extracellular to Patch Recording." IEEE Trans. Biomed. eng. 40 p35 (1993).		Article Article
11/05/02	Norihisa Miki	Drup Delivery	.T. Santini, Jr., M.J. Cima, R. Langer, "A Controlled Release Microchip," Nature, Vol. 397, pp. 335-338, Jan 28, 1999 D. Maillefer, S. Gamper, B. Frehner, P. Balmer, H. van Lintel, and P. Renaud, "A High-performance Silicon Micropump for Disposable Drug Delivery Systems," IEEE MEMS2001, pp413-417. S. Sershen, J. West, "Implantable, polymeric systems for modulated drug delivery ," Advanced Drug Delivery Reviews 54 (2002) pp.1225-1235.		Article Article Article
11/26/02	Kevin Turner	fabrication and use of piezoresistive cantilevers to measure small forces	Chui et al., Applied Physics Letters, 72(11) p.1388-90 (1998) Liang et al. Hilton Head 2000, p. 33-8 (2000) Autumn et al, PNAS, Sep 17, 2002		Article Article Article
12/09/02	Hang Lu	Fabrication of wearable electronics	Rogers, J.A. et al. Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks. PNAS, April 24, 2001, vol. 98, no. 9 pp 4835–4840 Loo, Y.L. et al. Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics. APPLIED PHYSICS LETTERS VOLUME 81, NUMBER 3, pp 562-564. Loo, Y.L. et al. Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination. PNAS, August 6, 2002, vol. 99, no. 16, pp 10252–10256		Article Article Article