== MIT ==
What and Who?	Topics of Discussions	Schedule	Links

Fall 2003
 

Date	Host	Topic	Paper References	Affiliations	Web Access*
12/11/03	Xue'en Yang	Anodic bond with intermediate layers	J.A.Plaza, et al, Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding, Sensors and Actuators A 67 (1998) 181-184 Thomsa M.H. Lee, et al, Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates, Sensors and Actuators 86 (2000) 103-107	Centro Nacional de Microelectronica, Spain Hong Kong U of Science and Technology	Article   Article
11/20/03	Hyun Jin In	Hi-Q inductors and micro-origami	Y.-J. Kim, et al, Surface Micromachined Solenoid Inductors for High Frequency Applications, IEEE transactions on components, packaging, and manufacturing technology, part C, vol. 21, NO. 1, Jan, 1998 J.-B. Yoon, et al, 3-D Lithography and metal surface miromachining for RF and Microwave MEMS, IEEE P. O. Vaccaro, et al, Valley-fold and mounatain-fold in the micro-origami technique, Microelectronics Journal 34 (2003) 447-449		Article   Article   Article
11/13/03	Lodewyk Steyn	Hydrogen seperation	Karnik: Towards a Palladium Micro-Membrane for the Water Gas Shift Reaction: Microfabrication Approach and Hydrogen Purification Results,JMEMS, Feb '03 Tong: A HYDROGEN SEPARATION MODULE BASED ON WAFER–SCALE MICROMACHINED PALLADIUM-SILVER ALLOY MEMBRANES, Transducres '03		Article   Article
10/30/03	Yawen Li	Polymer actuator and biomolecular motor	E. W. H. Jager,  E. Smela, Olle Ingana, Microfabricating Conjugated Polymer Actuators, 24 NOVEMBER 2000 VOL 290 SCIENCE R.K. Soong, G. D. Bachand, et al, Powering an Inorganic Nanodevice with a Biomolecular Motor, SCIENCE VOL 290 24 NOVEMBER 2000 R. D. ASTUMIAN,  making  molecules into motors, SCIENTIFIC AMERICAN JULY 2001		Article Article Article
10/16/03	Nicolas Szita	uTAS'03	B.L. Carvalho, et al, Soft Embossing of Microfluidic Devices, 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems, Oct 5-9, 2003, Squaw Valley, California, USA, pp 959-962 M. Kanai, et al, PDMS Microfluidid Devices with PTFE Passivated Channels, 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems, Oct 5-9, 2003, Squaw Valley, California, USA, pp 429-432 V.V.Abhyankar, et al, Human Embryonic Stem Cell Culture in Microfluidic Channels, 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems, Oct 5-9, 2003, Squaw Valley, California, USA, pp 17-20	Tecan Boston   Schimadzu Corp & Waseda U. Japan                     U of Wisconsin, Madison	Article   Article   Article
10/01/03	Kevin Turner	microsystems for molecular diagnostics	R.C.McGlennen, Miniaturization Technologies for Molecular Diagnostics, Clinical Chemistry, 47:3, 2001, pp 393-402 J. Fritz, et al, Translating Biomolecular Recognition into Nanomechanics, Science, 14 April 2000, Vol 288, pp 316-318	U of Minnesota medical school IBM, Zurich, U of Basel, Switzerland	Article Article
09/17/03	Jin Zou	Failure in MEMS Packaging	"Component Failure Analysis in MEMS Packaging" Jin Zou and C. H. Mastrangelo "Adhesion related failure mechanism in MEMS device" C.H. Mastrangelo "Thermal Challenges in MEMS applications: phase change and thermal bonding" Liwei Lin "wafer to wafer bonding for Microstructue Formation" Martin Schmidt	U of Michigan U of Michigan Berkeley MIT	Article Article Article Article

Summer 2003
 

Date	Host	Topic	Paper References	Affiliations	Web Access*
08/21/03	Valerie Leblanc	Fabrication of nano- and micro-systems	[1] G.M. Kim, B.J. Kim, J.Brugger, "Photoplastic shadow-masks for rapid resistless mulilayer micro patterning" Proc of TRANSDUCERS 2001, pp 1632-1635. [2] K.Lee et al. "3D fabrication using deep X-ray mask with integrated micro-actuator" Proc. of MEMS 2003, pp 558-561. [3]P. Vertiger "the millipede - nanotechnology entering data storage" IEEE Transaction on nanotechnology. Vol1, No1, March 2002.		Article   Article   Article
08/15/03	Lodewyk Stern	"Grayscale Lithography" and  "Conventional Micromachining"	Waitz, Modafe and Ghodssi, "Investigation of gray scale technology for large area 3D silicon MEMS structures", J. Micromech and Microeng, 13 (2003) pp 170-177 Purdy, "Fabrication of complex micro-optic components using photo-sculpting through halftone transmission masks", Pure Appl. Opt. 3 (1994) 167-175 Remier, Henke, Quenzer, Pilz, Wagner, "One-Level Gray-Tone design - Mask data preparation and pattern transfer", Microelectronic Engineering 30 (1996) 559-562 Fang, Wu, Liu, Ng, "Tool geometry study in micromachining", J. Micromech & Microeng, 13 (2003) 726-731	University of Maryland	Article   Article   Article   Article
08/08/03	Yawen Li	Diamond MEMS	A.R. Krause et al, Ultrananocrystalline  diamond thin films for MEMS and moving mechanical assembly devices, Diamond and Related Materials 10(2001), pp 1952-1961 J.P.Sullivan et al, Developing a New Material for MEMS: Amorphous Diamond, Material Research Soceity Symp. Proc. Vol.657, 2001, pp EE7.1.1-EE7.1.9 M. Adamschik et al, Diamond micro system for bio-chemistry, Diamond and Related Materials 10(2001) 722-730	Argonne National Lab, IL & IFAM, Bremen, Germany Sandia & MIT, Cornell U of Ulm, Germany	Article Article Article
07/31/03	Nicolas Szita	The new laser system			Article Reference Slide Added Ref
07/24/03	Tomoya Inoue				Article Article Article
07/17/03	Nuria De Mas				Article Article Article
07/10/03	Xue'en Yang	MEMS switches, tunable capacitors and RF applicatioins	G.M. Rebeiz, "RF MEMS Switches: Status of the Technology" pp 1726-1729 D.T. McCormick, Z. Li, and N.C. Tien, "Silicon MEMS Tunable Capacitors Operating in Dielectric Fluid," pp873-876 A. Oz and G.K. Fedder, "RF CMOS-MEMS Capacitor having Large Tuning Range," pp835-838 K. Hachisuka, "Development and Performance Analysis of an Intra-Body Communication Device," pp 1722-1725	U of Michigan   U.C. Davis & Cornell   Carnegie Mellon U.   U of Tokyo	Article Article Article Article
06/26/03	Nori Miki		S. Matsui, "Three-Dimensional Nanostructure  Fabrication by Focused-Ion-Beam Chemical Vapor Deposition" pp.179-181 T. Ito et.al., "Room Temperature Vacuum Sealing Using Surface Activated Bonding Method," pp.1828-1831. D. Sparks, et.al. "A Microfluidic System for the Measurement of Chemical Concentration and Density." pp.300-303		Article Article Article
06/20/03	Kevin Turner	Novel Fab Senturia's Transducer Talk	T.J. Brosnihan, et al. "OPTICAL IMEMS ® – A FABRICATION PROCESS FOR MEMS OPTICAL SWITCHES WITH INTEGRATED ON-CHIP ELECTRONICS," The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, pp 1638-1642 P. Merz, et al. "A novel micromachining technology for structuring borosilicate glass substrates," The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, pp 258-261 Stephen D.Senturia, PERSPECTIVES ON MEMS,PAST AND FUTURE: THE TORTUOUS PATHWAY FROM BRIGHT IDEAS TO REAL PRODUCTS	Analog Devices/Clare Inc. Fraunhofer Institute for Silicon/SUSS MicroTec AG, Munich MIT	Article   Article   Article
06/04/03	Hang Lu	Near Field Spectroscopy	R. Eckert, et al. "Near-field optical microscopy based on microfabricated probes," Journal of Microscopy, Vol. 202, Pt 1, April 2001, pp. 7-11. M.J. Levene, et al. "Zero-Mode Waveguides for Single-Molecule Analysis at High Concentrations," Science, Vol 299, 31 January2003, pp 682-686	CSEM, Switzerland Craighead & Webb, Cornell U.	Article   Article

Spring 2003
 
 

Date	Host	Topic	Paper References	Affiliations	Web Access*
05/13/03	John Hart	Growth of carbon nanotubes	Zhu, et al. "Direct Synthesis of Long Single-Walled Carbon Nanotube Strands"  Science,  296:884, 2002. Huang, et al. "Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates" JACS, 125:5636, 2003. Melosh, et al. "Ultrahigh-Density Nanowire Lattices and Circuits" Science 300:112, 2003.	Tsinghua U, Beijin Duke U. Cal tech & California Nanosystems Int.	Article   Article   Article
04/29/03	Siriram Krishnan	Self-assembly by functionalizing surfaces	J. Lahann, M. Balcells, T. Rodon, J. Lee, I. S. Choi, K. F. Jensen, and R. Laner, "Reactive Polymer Coatings: A Platform for Patterning Proteins and Mammalian Cells onto a Broad Range of Materials," Langmuir 2002, 18, pp 3632-3638 S. W. Lee, H. A. McNally, D. Guo, M. Pingle, D. E. Bergstrom, and R. Bashir, "Electric-Field-Mediated Assembly of Silicon Islands Coated with Charged Molecules," Langmuir 2002, 18, pp 3383-3386	MIT & KAIST Purdue U.	Article     Article
04/22/03	Hongwei Sun	3D MEMS and applications	Micro-stereolithography of polymeric and ceramic microstructures  by Zhang X, Jiang XN, Sun C, SENSORS AND ACTUATORS A-PHYSICAL, 77 (2): 149-156 OCT 12 1999 Submicron manipulation tools driven by light in a liquid by Maruo S, Ikuta K, Korogi H, APPLIED PHYSICS LETTERS, 82 (1): 133-135 JAN 6 2003		Article     Article
04/15/03	Xue'en Yang	Assembly of nanowires with fluid flow ESS(empty sapce in silicon)	Yu Huang, Xiangfeng Duan, Qingqiao Wei,  Charles M. Lieber, "Directed Assembly of One-Dimensional Nanostructures into Functional Networks," SCIENCE  26 JANUARY 2001 VOL 291  Mizushima,-I.; Sato,-T.; Taniguchi,-S.; Tsunashima,-Y. "Empty-space-in-silicon technique for fabricating a silicon-on-nothing structure, " Applied-Physics-Letters. 13 Nov. 2000; 77(20): 3290-2 Yu Huang, Xiangfeng Duan, Yi Cui, 1 Lincoln J. Lauhon, Kyoung-Ha Kim, Charles M. Lieber, "Logic Gates and Computation from Assembled Nanowire Building Blocks," SCIENCE VOL 294 9 NOVEMBER 2001	Lieber, Harvard Toshiba Corp.	Article     Article       Article
04/08/03	Thomas Burg	Bottom-up fabrication, etc.	"Direct drawing method for microfabrication based on selective metal plating technology" "Building thick photoresist structures from the bottom up" "Quantitatively controlled nanoliter liquid manipulation using  hydrophobic valving and control of surface wettability" "Glow discharge in microfluidic chips for visible analog computing"	Konishi, Ritsumeikan U. Kyoto Peterman, Stanford U. Lee, Seoul National U. Whitesides, Imperial College, London and Harvard U.	Article Article Article Article
04/01/03	Kevin Turner	Surface tension	S.K. Cho et al., JMEMS,12(1) p. 70 (2003). K. Sato et al., Precision Engineering, 27 p.42 (2003).	C.J. Kim's group at UCLA Tokyo Inst. of Tech	Article Article
03/18/03		MEMS Startups
03/11/03		MEMS Startups
03/04/03	Nicholas Conway	Fabrication methods of micro mirror with SOI and micro channels with SU8	Lee et al, "SOI-based fabrication processes of the scanning mirror having vertical comb fingers," Sensors and Actuators A 102 (2002) 11-18. Chuang et al, " A novel fabrication method of embedded micor-channels by using SU-8 thick film photoresists," Sensors and Actuators A 103 (2003) 64-69.	Samsung, KAIST, South Korea National Tsing Hua U, Taiwan	Article Article
02/25/03	Tomoya Inoue	Microfluidics in MEMS'03	“Micromachined Biodegradable Microstructures” by J.-H. Park, et al., Mark Allen’s group, Georgia Tech. “A Novel Fabrication of In-Channel 3-D Micromesh Structure Using Maskless Multi-Angle Exposure and Its Microfilter Application” by H. Sato et al, Waseda University, Japan “Integrated Vertical Screen Microfilter System Using Inclined SU-8 Structures” by Y. –K. Yoon, Mark Allen’s group, Georgia Tech.		Article Article Article
02/13/03	Norihisa Miki	Nano's in MEMS'03	Micromachined Arrayed Dip Pen Nanoligthography Probes for Sub-100nm Direct  Chemistry Patterning, D. Bullen et.al., Transportation of Micromachined Structures by Biomolecular Linear Motors R. Yokokawa, et.al., Nano Wires by Self Assembly, Taher Saif, et.al.		Article Article Article

2002 Meetings