== MIT ==
What and Who?	Topics of Discussions	Schedule	Links

Fall 2004

Summer 2004
 

Date	Host	Topic	Paper References	Affiliations	Web Access*
07/08/04	Sriram Krishnan	Torsion: From <111> Si to Tacoma Narrows	E. Willemenot and P Touboul, Electrostaticlaly suspended torsion pendulum, Review of Scientific Instruments, V. 71, N.O. 1, Jan 2000, pp 310-314 J. Kim, D. Cho, R. S. Muller, Why is (111) silicon a better mechanical material for MEMS?  K. Y. Billah, R. H. Scanlan, Resonance, Tacoma Narrows bridge failure, and undergraduate physics textbooks, Am. J. Phys, 59(2), February 1991, pp 118-124 Z. Xiao, W. Peng, K. R. Farmer, Analytical Behavior of Rectangular Electrostatic Torsion Actuators With Nonlinear Spring Bending, JMEMS, Vol. 12, NO. 6, December 2003, pp 929-936	ONERA, France, Seoul National U. and berkeley Princeton U., NJ, John Hopkins U., MD NJ Inst. of Tech, NJ	Article Article Article Article
07/01/04	Thormas Burg	Large deflections in MEMS	H.S. Kim, A.B. Ucok, K. Najafi;  HH2004 H. Hartshorne, C.J. Backhouse, W.E. Lee, Sensors and Actuators B99 (2004) 592-600 E. Kai, T. Pan, B. Ziaie; HH2004 Quake's famous paper: "Microfluidic Large-Scale Integration"	Univ. of Michigan; Micralyne Inc & Univ. of  Alberta; Univ. of Minnesota;	Article Article Article Article
06/24/04	Kevin Turner (again)	Hilton Head'04	M.R. Kaazempur-Mofrad, et al,  A MEMS-based renal replacement system M-C M. Lee and M. C. Wu, 3D silicon transformation using hydrogen annealing C.G. Wilson and Y. B. Gianchandani, Microgeiger: a microfabricated gas-based beta radiation detector	MIT, MGH & Draper UCLA U of Michigan, Ann Arbor	Article Article Article
06/17/04	John Hart	Patterning of sub-micron structures	Decre et al. 2004: Wave Printing (I) : Towards Large-Area, Multilayer Microcontact Printing. Jung et al. 2004: Fabrication of a 34 x34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography Whang et al. 2003: Nanolithography Using Hierarchically Assembled Nanowire Masks Glass et al. 2003 (might not be discussed)		Article Article Article Article
05/28/04	Kevin Turner	Fabrication of metal MEMS	M.  Aimi, M. Rao , N. MacDonald, A. Samah Zuruzi and D. Bothman, High-aspect-ratio bulk micromachining of titanium Terry J. Garino, Alfredo Morales, Thomas Buchheit and Brad Boyce, The Fabrication of Stainless Steel Parts for MEMs	University of California, Santa Barbara (UCSB) Sandia National Laboratories	Article       Article

 

Spring 2004
 

Date	Host	Topic	Paper References	Affiliations	Web Access*
05/07/04	Valerie Leblanc	Fabrication	N. Takeda, MEMS applications of Ball Semiconductor Technology T. Bourouina, T. Masuzawa, H. Fujita, The MEMSNAS Process: Microloading Effect for Micromachining 3-D Structures of Nearly all Shapes	Ball Semiconductor Inc. Ecole Superieure d'ingenieurs en   Electrotechnique et Electronique, France and University of Tokyo, Japan	Article   Article
04/21/04	Benjamin Wunsch	Self-assembly of structure	C. Chua, D. Fork, K. Van Schuylenbergh, J.-P. Lu, High-Q RF coils on silicon integrated circuits , MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II,  Proceedings of SPIE Vol. 4981 (2003)  E. Quevy, P. Bigotte, D. Collard, L. Buchaillot, Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates, Sensor and actuators A 95 (2002) 183-195 P. Kazmaier, N.Chopra, Bridging size scales with self-assembling supramolecular materials, MRS Bulletin April 2000	Palo Alto Research Center     Institut d'electronique et de microelectronique du nord, France and University of Tokyo, Japan	Article   Article   Article
04/07/04	Yawen Li	Nanoporous silicon and biocompatibility	L. Leoni, D. Attiah, T. A. Desai, Nanoporous platforms for cellular sensing and delivery, Sensors 2002, 2, 111-120 G. Kotzar, M. Freas, P. Abel, A. Fleischman, S. Roy, C. Zorman, J. M. Moran, J. Melzak, Evaluation of MEMS materials of construction for implantable medical devices, Biomaterials, 23 (2002) 2737-2750	University of Illinois and Boston University BIOMEC, Inc, NASA Glenn Research Center, Cleveland Clinic Foundation,  and  Case Western Reserve University	Article   Article
/24/04	Hongwei Sun	Polymerase Chain Reaction	M. U. Kopp, A.J. de Mello, A. Manz, Chemical Amplification: Continuous-Flow PCR on a Chip, SCIENCE, Vol. 280, 15 may 1998 M. Bu, T. Melvin, G. Ensell, J.S. Wilkinson, A.G. R. Evans, Design and theoretical evaluation of a novel microfluidic device to be used for PCR, J. Micromech. Microeng., 13 (2003) E. Verpoorte, N. F. De Rooij, Microfluidics Meets MEMS, Proc. IEEE, Vol. 91, No. 6, June 2003	Imperial College, London   University of Southamptom, UK   University of Neuchâtel, Switzerland	Article Article Article
03/10/04	Jin Zhou	Application related MEMS	Ki Bang Lee and Liwei Lin, Electrolyte-Based On-Demand and disposable Microbattery, JMEMS, VOL. 12, NO. 6, DECEMBER 2003 E. T. Carlen and C. H. Mastrangelo, PARAFFIN ACTUATED SURFACE MICROMACHINED VALVES, MEMS'00 Jun Xie, Jason Shih and Yu-Chong Tai, INTEGRATED SURFACE-MICROMACHINED MASS FLOW CONTROLLER, MEMS'03	U.C. Berkeley   U of Michigan   Caltech	Article Article Article
02/25/04	Lodewyk Steyn	Nano wires, fabrication and self-assembly Minature motor	E. Alaca, H. Sehitoglu and T. Saif, Fabrication of directed nano wire networks through self-assembly, IEEE(?) J.G.Wen, et al, Self-assembly of semiconducting oxide nanowires, nanorods, and nanoribbons, Chemical Physics, Letters, 372 (2003) 717-722 Ta. Shigematsu and M. K. Kurosawa, Miniaturized SAW motor with 100 MHz driving frequency, IEEE (?)	U of Illinois at Urbana-Champaign U of Illinois and Boston college Tokyo Inst of Tech	Article Article Article
02/11/04	James White	MEMS'04	C. P. Steiner, et al, Bubble-Free Priming of Blind Channels H.-Y. Chu and W. Fang, A Novel Convex Corner Compensation for Wet Anisotropic Etching on (100) Silicon Wafer K. Hamaguchi, et al, 3-nm Gap Fabrication Using Gas hase Sacrificial Etching for Quantum Devices	IMTEK, Germany National Tsing Hua U, Taiwan Toyota, Japan	Article Article Article

2003 Meetings

2002 Meetings