• B.-H. Jo, L. Van Lerberghe, K. Motsegood, D. Beebe, "Three-Dimensional Micro-Channel Fabrication in Polydimethylsiloxane (PDMS) Elastomer"
• A.-G. Pawlowski, A. Sayah and M. Gijs, "Accurate masking technology for high-resolution powder blasting"
• S. Satyanarayana, R. Karnik, and A. Majumdar, "Stamp-and-Stick Room-Temperature Bonding Technique for Microdevices"

• University of Illinois at Urbana-Champaign

• Ecole Polytechnique Federale de Lausanne, Switzerland

• University of California, Berkeley

• A. van Oudenaarden, S. Boxer, "Brownian Ratchets: Molecular Separations in Lipid Bilayers Supported on Patterned Arrays"
• L. Huang, E. Cox, R. Austin, J. Sturm, "Continuous Particle Separation Through Deterministic Lateral Displacement"
  

• Stanford University

• Princeton University

• Man Lee, Luthur Siu Lun Cheung, Yi-Kuen Lee and Yitshak Zohar, "Height effect on nucleation-site activity and size-dependent bubble dynamics in microchannel convective boiling"
• Rebecca Braff Maxwell, Antimony L. Gerhardt, Mehmet Toner, Martha L. Gray, and Martin A. Schmidt, "A Microbubble-Powered Bioparticle Actuator"

• Hong Kong University of Science and Technology, and University of Arizona, Tucson

• MIT
  

• K. Shah, W. Shin, R. Besser, "A PDMS proton exchange membrane fuel cell by conventional and non-conventional microfabrication techniques"
  
• P.J.A. Kenis et al. "Microfabrication and characterization of a silicon-based millimeter scale PEM fuel cell operating with huydrogen, methanol, or formic acid
  
• P. Reuse et al. "Hydrogen production for fuel cell application in an autothermal micro-channel reactor"
  

• Louisiana Tech University

• University of Illinois, Urbana

• Swiss Federal Institute of Technology, Switzerland
• Forschungszentrum Karlsruhe, Germany
  

• M. Northen, K. Turner "Multi-scale compliant structures for use as a chip-scale dry adhesive"
• M. Fukuda et al. "Development of a micro lancet needle made of biodegradable polymer for low-invasive medical treatment"
• C.-F. Chiang, C.-H. Liu, C. Chang, C.-H. Liu, "A lobster-sniffing inspired actuator for manipulation of micro-objects via controlling local fluid"
  

• University of California, Santa Barbara
  

• Kansai University and Lightnix, Inc, Japan
  

• National Tsing-Hua University, Taiwan
  

• I. De Wolf, "Raman spectroscopy: about chips and stress"
• I. De Wolf, "Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits"
• B. Li et al, "Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system"
  

• Interuniversity Micro-Electronics Center (IMEC), Leuven, Belgium
• IMEC, Belgium

• Boston University, USA, Singapore University, Singapore and Tsinghua University, China
  

• D. Petsev et al, "Microchannel protein separation by electric gradient focusing"
• C. Cabrera et al, "Formation of Natural pH Gradients in a Microfluidic Device under Flow Conditions: Model and Experimental Validation"
  

• University of New Mexico, Albuquerque

• University of Washington, Seattle
  

• Z. Liu, D. L. DeVoe, "Micromechanism fabrication using silicon fusion bonding"
• A. Weinert, P. Amirfeiz, S. Bengtsson, "Plasma assisted room temperature bonding for MST"
• X. X. Zhang, J.-P. Raskin, "Low-Temperature Wafer Bonding: a study of  void formation and influence on bonding strength
  

• University of Maryland

• Chalmers University of Technology, Sweden

• Universite Catholique de Louvain, Belgique
  

• M.M.J. Decré, R. Schneider, D. Burdinski, J. Schellekens, M. Saalmink and R. Dona, "Wave Printing (I) : Towards Large-Area, Multilayer Microcontact Printing."
• J. Schellekens, D. Burdinski, M. Saalmink, M. Beenhakkers, G. Gelinck and M.M.J. Decré, "Wave Printing (II) : Polymer MISFETs Using Microcontact Printing."

• Philips Research Laboratories Eindhoven

• Jeffrey T. Butler, Victor M. Bright, John H. Comtois, "Multichip module packaging of microelectromechanical systems"
• Ajay P. Malshe., "Development of a Curriculum in Nano and MEMS Packaging and Manufacturing
  for Integrated Systems to Prepare Next Generation Workforce"

• Air Force Institute of Technology, OH
  Universi& of Colorado, Boulder, US Air Force Research Laboratory, NM
  

• University of Arkansas

• S. Knappe et al., "A microfabricated atomic clock"
• Li-Anne Lied, et al., "Micromachined alkali atom vapor cells for CHIP-SCALE atomic clocks"
• Gianluca Piazza, et al., "Design of a monolithic piezoelectrically actuated microelectromechanical tunable vertical-cavity surface-emitting laser"
  

• NIST

• NIST

• Berkeley
  

• Charlot et al., "A Sweeping Mode Integrated Fingerprint Sensor With 256 Tactile Microbeams"
• Sato et al., "Novel Surface Structure and Its Fabrication Process for MEMS Fingerprint Sensor"
• Han et al., "Thermal Analysis of Fingerprint Sensor Having a Microheater Array"
  

• INPG, Grenoble, France

• NTT Corporation, Japan

• Nagoya University, Japan
  

• T. Sounart et al., Frequency-Dependent Electrostatic Actuation in Microfluidic MEMS
• M. Kohl et al., A microfluidic expermental platform with internal pressure measurements
  

• Sandia National Laboratories
• Georgia Institute of Technology
  

Article

• M. Burns et al., An Integrated Nanoliter DNA Analysis Device
• J.W. Hong et al., A nanoliter-scale nucleic acid processor with paralel architecture

• University of Michigan, Ann Arbor
• California Institute of Technology, CNRS/LPN, France and University of Southern California

Article