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 Materials, Processes, and Devices for MEMS Biological and Chemical MEMS Actuators and Power MEMS Sensors, Systems, and Modeling |
|
M.A. Schmidt
- Materials/Technology/Metrology/CAD
- Wafer Bond Alignment and Strength Characterization
- Micro/Nano Mechanics and Sensors
- A Vacuum-Bonding Process for Packaging of High Temperature Microreactors
- Chem/Bio MEMS
- Microfabricated
Cell Analysis Device
Microreactors for Catalyst Testing
Password-protected Documents:- Conferences: 1-25
| 26-49 | 50-74
| 75-99
Publications
Student Theses
Massachusetts Institute of Technology
contact us:
MEMS@MIT
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Cambridge, MA 02139