MEMS at MIT MEMS@MIT
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Research Areas
Materials, Processes, and Devices for MEMS
Biological and Chemical MEMS
Actuators and Power MEMS
Sensors, Systems, and Modeling

search MEMS@MIT:

M.A. Schmidt

Materials/Technology/Metrology/CAD
Wafer Bond Alignment and Strength Characterization
Micro/Nano Mechanics and Sensors
A Vacuum-Bonding Process for Packaging of High Temperature Microreactors
Chem/Bio MEMS
Microfabricated Cell Analysis Device
Microreactors for Catalyst Testing

Password-protected Documents:
Conferences: 1-25 | 26-49 | 50-74 | 75-99
Publications
Student Theses