MEMS at MIT MEMS@MIT
image
image
image
image
image
image
image
image
image
image
image
image
image
image
image
image
image
image
Research Areas
Materials, Processes, and Devices for MEMS
Biological and Chemical MEMS
Actuators and Power MEMS
Sensors, Systems, and Modeling

search MEMS@MIT:

Actuators and Power MEMS

  1. A Fully Micro-fabricated Planar Array of Electrospray Emitters for Space Propulsion Applications
  2. Carbon Nanotube Electron Sources for Space Propulsion Applications
  3. A High-density Electron Source that uses Un-gated Transistors for Ballasting
  4. High Speed Three-dimensional Scanner for in vivo Non-invasive Optical Biopsy using Two-photon Microscopy
  5. Autothermal Catalytic Micromembrane Devices for Portable High-purity Hydrogen Generation
  6. Thermal Management in Devices for Portable Hydrogen Generation
  7. A Large-strain, Arrayable Piezoelectric Microcellular Actuator by Folding Assembly
  8. Piezoelectric Micro-power-generator: MEMS Energy-harvesting Device for Self-powered Wireless Corrosion-monitoring System
  9. Fabrication of a Fully-integrated Multiwatt µTurboGenerator
  10. A Portable Power Source Based on MEMS and Carbon Nanotubes
  11. A MEMS Steam Generator
  12. Microscale Singlet Oxygen Generator for MEMS-based COIL Lasers
  13. Micromechanical Actuators for Insect Flight Mechanics
  14. MEMS Micro-vacuum Pump for Portable Gas Analyzers
  15. A MEMS-relay for Power Applications
  16. A Silicon-etched, Electrical-contact Tester
  17. Microfabricated Thin-film Electrolytes and Electrodes for Solid Oxide Fuel Cells
  18. Design, Fabrication, and Testing of Multilayered Microfabricated Solid Oxide Fuel Cells (SOFCs)