Last updated 3/12/98
| Time | Topic | Speaker | |
|---|---|---|---|
| 8:00 AM | Welcome & Introduction | TBD | |
| 8:15 | Overview of CMP Processes | Ara Philiposian (Intel) | |
| 9:00 | Overview of ESH Concerns | Sarah Gibson (Motorola) | |
| 9:30 | Env. Issues of Chemicals used in CMP & Post-CMP cleaning | Srini Raghavan (U o A) | |
| 10:00 | Break | ||
| 10:15 | Spent Slurry Treatment | Anu Ramana (Rodel) | |
| 10:45 | Spent Slurry Treatment | Vlasta Brusic (Cabot) | |
| 11:15 | CMP Waste Research | D.Hetherington (Sandia) | |
| 12:00 PM | Lunch | (Not provided.) | |
| 1:30 | Distribution of Bulk Chemicals | John Bare (FSI) | |
| 2:00 | Slurry Waste Filtration | Ben Tracin (Pall) | |
| 2:30 | Water/Slurry Use Optimization | John Adams (IPEC) | |
| 3:00 | Break | ||
| 3:30 | Copper Removal | Lyle Kerman (Kinetico) | |
| 4:00 | Physical/Chemical Treatment | Mohammed Bayan (SMU) | |
| 4:30 | Adjourn |
| Doubletree Hotel San Jose |
| 2050 Gateway Place |
| San Jose, CA 95110 |
| Phone: 408.459.4000 |
No sleeping rooms have been blocked for this meeting. Please make your sleeping room reservations at the Doubletree Hotel or the following suggested hotels.
| Wyndham Hotel San Jose | - or - | Hyatt San Jose Airport |
| 1350 N. First Street | 1740 N. First Street | |
| San Jose, CA 95112 | San Jose, CA 95112 | |
| Phone: 408.453.6200 | 408.993.1234 |
Many hotels are imposing a fee for early check-outs. this policy is entirely at the discretion of the hotel and the amount of the fee may vary by hotel. to avoid an early departure charge, be sure to verify your actual date of departure at the time of check-in.