Semiconductor ESH in the News
A summary of news briefs of interest to the semiconductor
environmental, safety, and health community, offered as part of the
SRC/SSA/Sematech - Excellence Award for Research in
Manufacturing Environmental Safety and Health
- Nominations are being accepted for the
SRC/SSA/Sematech Excellence Award for Research in
Manufacturing Environmental Safety and Health. Nominations are
open until Jan. 31, 2000.
EPA Guidance on Semiconductor (469) vs. Metal Finishing (433) Applicability
The EPA has issued a guidance letter on how the 40 CFR Rules should apply
to semiconductor manufacturing. In particular, the guidance clears up
confusion as to whether or when the 40 CFR 433 rules (Metals Finishing)
should apply. This is important
given the new use of electroplating and polishing processes
(particularly of copper) in semiconductor fabrication, and appears to
indicate that these fabrication steps should be considered under the
existing 40 CFR 469 (Semiconductor Manufacturing) rules. A copy
without supporting appendices, is available.
"Use of reclaimed wafers offers cost savings"
As report in the August 1998 issue of CleanRooms (PennWell),
there is an increased interest in reclaiming wafers for use in
semiconductor applications (e.g. for furnace monitoring, testing
lithography equipment, other equipment or process testing, and for
particle monitoring). This will be especially important for 300mm,
but is also of interest in order to cut costs on existing technologies.
"Cirent install Pall Ultrafiltration system at Floriday Plant"
As reported in "CleanRooms" magazine
(PennWell), Pall has installed a Microza ultrafiltration system
at a Cirent Semiconductor plant to treat chemical mechanical
polishing (CMP) wastewater so as to remove and concentrate
``Lawsuits prompt focus on cleanroom safety''
As discussed in a front page article in "CleanRooms" magazine
(PennWell), additional attention is being devoted to cleanroom safety.
The article specifically mentions suits by Zilog workers settled in
1996, as well as a more recent (Feb. 1998) single-worker suit at IBM
disk facility in San Jose. The article nots that "US companies are
now looking to avert the mistakes of the past by instituting
state-of-the-art-processing procedures, including quality sampling
procedures" to address safety issues.
December 22, 1997
``Fabs Worry About Energy Usage''
As reported in
Planergy and SEMATECH have
conducted an initial study examining how energy is used in semiconductor
fabs. A survey of AMD's Fab 25 indicated large opportunities for
energy savings and cost reductions (e.g. an annual savings of over
$570,000) with no impact on production).
May 26, 1997
Sulfuric Acid Recycling
Quoted from the May 26, 1997 Issue of
"Olin Microelectronic Materials has begun a recycling program of
sulfuric acid for SGS-Thomson Microelectronics' Fab 1 in Phoenix. This
recycling program offers semiconductor manufacturers cost savings,
according to Olin, over the commonly used alternatives of disposing or
neutralizing the used chemicals. This recycling effort is the
company's first step toward its Rent-A-Chem concept under which Olin
maintains ownership, and therefore, full-life responsibility for all
the chemicals it provides. The company claims its cheaper for
semiconductor manufacturers, its customers, and better for the
environment. Semiconductor manufacturing uses a high volume of
sulfuric acid. Olin finds alternative uses for the used sulfuric acid,
which eliminates the negative environmental impact of disposing or
neutralizing, according to Olin, the company maintains that the cost
of the recycling program is lower than the cost of neutralization."
Copyright © 1998
by Massachusetts Institute of Technology. All rights reserved.