Note: this page is no longer maintained.
September 3, 2007
General updates to correct changes in web links as laboratories and
university microfabs have moved around on the web. The apparently
broken links below have been removed from the map above (I
could not immediately find a new link to the lab):
I have retained the original descriptions and links in the dated texts
below. Many of these links have also changed (they are changed in the interactive
subway map above), but have not yet been updated in the descriptions below.
October 20, 2006
Lab at the Nanyang Technological
University in Singapore consists of 330 sq.m. of Class 100
cleanroom and associated supporting facilities. It is equipped with
advanced wafer fabrication equipment for the processing of 150mm
silicon wafer. The mission of the MFL is to provide the common
training and research facility for the researchers and students in NTU
and other teaching and research institutes to conduct teaching and
research in wafer fabrication technology and related microfabrication
technologies, e.g. integrated micorsensors, Micro-System
Technology(MST), MCM and reliability study. Apart from this, we also
provide service to the industry through various technical
collaborations and also training programmes.
May 31, 2006
The Arizona Micro/Nano Fabrication Center at
the University of Arizona is an educational, research, and industrial resource
for micro and nanofabrication in southern Arizona.
July 31, 2004
The IML is a class 10 cleanroom located on the BYU campus, used for
research in solid state, optoelectronics, photonics, nanotechnology,
microfabrication, MEMS, micro fluidics, etc. This site is intended to
be a resource for on-site BYU users as well as visitors doing research
in microfabrication and semiconductor processing.
August 30, 2003
A Nanofabrication Facilities Compendium has been compiled by Victor Jones at
August 7, 2003
The Yale University Center for
Microelectronic Materials and Structures (uELM) has a major
laboratory facility in support of uELM research and education
activities, including a 2600 sq-ft class 100 Cleanroom that contains
equipment for solid state device fabrication, including facilities for
photolithography, wet chemical etching, oxidation, diffusion, thermal
evaporation, sputtering, reactive ion etching, chemical vapor
deposition, and other thin film processes.
July 21, 2003
The MEMS Exchange
coordinates a network of fabrication centers that lets users draft
process sequences which are performed across the boundaries separating
the individual facilities. The service is made available to the United
States community including commercial, academic, and government
The nanoHUB is a
"community computing environment" that proviides access to research
grade simulation tools along with the ability to operate simulation
packages through a www browser.
The Oak Ridge Center for Nanophase
Materials Sciences at Oak Ridge National Laboratory is a
collaborative nanoscience user research facility for the synthesis,
characterization, theory/ modeling/ simulation, and design of
nanoscale materials. It is one of five Nanoscale Science Research
Centers currently being established by the Office of Science,
U.S. Department of Energy.
center integrates three existing complementary instrumentation
facilities at NU: NIFTI, EPIC, and Keck-II -under a unified management
umbrella, and consolidated into contiguous space. These three
facilities are a unique, centralized, and integrated resource for the
NU community and beyond. NUANCE still retains the individual identity
of the three facilities but their integration into contiguous space,
and the unified management and operations permits synergy among
instruments, techniques, training, service, technical staff and their
The University of Illinois at
Chicago Microfabrication Applications Laboratory (MAL) is a
regional MEMS/Nano facility that offers inexpensive access, training,
service, and process guidance on a wide spectrum of micro/nano
fabrication and characterization equipment. The MAL offers non-profit
and industrial users a place where they can quickly prototype and
manufacture their devices.
The Case Western Reserve University
Microfabrication Laboratory (MFL) is a professionally staffed
and managed, fully equiped facility for
CMOS and non-CMOS processing.
January 7, 2003
University Center for Photonics and OptoElectronic Materials (POEM)
Micro/Nano Fabrication Laboratory is used for the
microfabrication of semiconductor and MEMS devices. Substrate sizes
range up to six-inch diameter, and lithographic capabilities range
from micron-scale features by contact lithography down to 100
nanometer (nm) features by electron beam lithography.
The Washington Technology Center
is a state science and technology organization
that funds and fosters industry-university collaborations. WTC connects
entrepreneurs and scientists who often need each other to bring
commercially promising ideas to fruition. Its cleanroom, located on the University of
Washington Campus in Seattle, is open to industry and academic users for
MEMS micromachining processing.
October 24, 2002
The Institute for
Micromanufacturing at Louisiana Tech University is engaged in the
research and development of novel micro and nanosystems for
biomedical, biological, environmental, information technology and
January 31, 2002
Operating within the School of Electrical and Electronic
Engineering, the Northern Ireland
Semiconductor Research Centre specialises in state of the art
silicon processing and device technology with a supportive
background of design and modelling skills.
May 28, 2001
The University of Western Ontario
Fab focuses on the fabrication of structures and devices of
sub-micron scale, and is intended to be a national resource to
December 16, 2000
Tel-Aviv University MicroTechnology Laboratory
is a cosortium-supported facility providing microfabrication capability and user access. Links
to research projects in MEMS and other areas at Tel-Aviv University are also provided.
August 25, 2000
The Modu-Lab site provides user
information (experiments to download, exercises, slide show) for the
Modu-Lab concept, a low-cost version of a semiconductor processing
laboratory designed for educational purposes.
August 23, 2000
The goal of the University of
Birmingam Nanoscale Physics Research Laboratory
is to advance the frontiers of the physics, chemistry and technology of
nanometre-scale structures, devices and processes.
March 22, 2000
The University of Alberta NanoFab
is an open access micro and nano fabrication
facility for the university community.
March 14, 2000
Information about molecular beam epitaxy capabilities, as well
as other research in compound semiconductors at Cornell.
October 4, 1999
The mission of the Princeton NanoStructures
Laboratory (NSL) is to explore and develop new nanotechnologies
that will fabricate structures substantially smaller, better, and
cheaper than current technology permits, and innovative nanoscale
electronic, optoelectronic, and magnetic devices by combining
cutting-edge nanotechnology with frontier knowledge from different
July 21, 1999
The Texas Tech
Program for Semiconductor
Product Engineering (PSPE) is designed to
help meet the enormous demand for trained
semiconductor product engineers. The Jack Maddox Research Lab
laboratory facility is dedicated to PSPE.
June 30, 1999
Microfabrication Lab at Boise State University
is a joint project between the College of
Engineering and the College of Applied Technology for
hands-on laboratory instruction of both 4-year undergraduate
engineering students and 2-year technology students, as well as
faculty and student research. It is also being made available to
interested faculty from other BSU departments (Chemistry, Physics,
Geology, Biology) as well as faculty from University of Idaho and
Idaho State University.
June 8, 1999
The Georgia Institute of Technology
Microelectronics Research Center (MiRC) provides expertise,
facilities, infrastructure and teaming environments to enable and
facilitate interdisciplinary research in microelectronics, integrated
optoelectronics, and microsensors and actuators.
January 24, 1998
The Center for Advanced Thin Film
Technology at the University of Albany acts as a research,
development, education, and economic outreach resource for industries
which manufacture, use, or supply microelectronics, electronics,
optoelectronics, and photonics devices and components.
December 12, 1998
The NIST Electronics and
Electrical Engineering Laboratory promotes U.S. economic
growth by providing measurement capability of high impact focused
primarily on the critical needs of the U.S. electronics and electrical
industries, and their customers and suppliers.
August 13, 1998
Semiconductor Laboratory (CSDL),
located within the Simon Fraser University Physics
and Engineering Science
Departments, is dedicated to the development of advanced
III-V semiconductor devices.
March 29, 1998
The Purdue University
Wide Band Gap research page
represents solid-state research relating to electronic (non-optical)
devices in the wide bandgap semiconductors SiC and GaN. It also
contains links to a large number of related activities at Purdue.
February 8, 1998
The University of Notre
Dame Microelectronics Laboratory
supports extensive facilities for the fabrication and testing of
electronic materials and devices with size scales down to the
nanometer range and temperatures to 10 mK.
November 21, 1997
The Lutz Microfabrication Facility is utilized for both
research and instructional purposes, and provides a state-of-the-art
environment for teaching both the fundamental and current fabrication
techniques used to manufacture integrated circuits (ICs), discrete
microelectronic devices, MEMS devices such as sensors and actuators,
and various electro-optic devices.
December 4, 1996
The New Jersey Institute of Technology (NJIT)
Center is an R & D unit for the design, manufacturing,
packaging, and test of integrated MEMS and CMOS devices.
September 1, 1996
The University of Toronto Electronic Materials Group
has processing, characterization, and computation facilities, and conducts a range of research
projects in electronic materials.
May 26, 1996
Center for Electronic Materials and Devices is an education
and research center in the College
of Engineering at
San Jose State University.
The focus is electronic materials and devices.
Research Triangle Center for Semiconductor Research
has a primary focus on GaAs- and InP-based heterojunction
bipolar transistor (HBT) devices and circuits for a variety of electronic and optoelectronic
April 12, 1996
The Asad Abidi Research
Group (AA Group) at UCLA provides information about its
analog IC research and design.
April 9, 1996
Center for Nanostructural
Materials Research (I/UCRC for NMR) is an interdisciplinary research
unit of the University of North Texas. The Center is dedicated to
understanding the atomic level structure, or nanostructure, of
materials used in aerospace, electronic, transportation, metallurgical
and many other industries.
March 19, 1996
- Carleton University's
Microelectronics Fabrication Laboratory (MFL) is a flexible
facility for manufacturing silicon integrated circuits and devices in
support of research on process technology, device physics and
modelling, innovative circuit techniques, photonics, biomedical
devices, and microelectromechanical systems (MEMS).
February 19, 1996
Research Laboratory at
University conducts research into particle generation, deposition,
and transport in semiconductor process equipment.
- The Centre for
Electronic Materials (CEM) provides information about its
research and postgraduate teaching related to electronic materials.
The CEM also maintains an organized and searchable database of
conferences and meetings related to semiconductors and
January 24, 1996
North Carolina Center for Advanced Electronic Materials
Processing is developing technologies for in
situ , single-wafer processing (cleaning, deposition, etching).
The program deals with automation and control of the individual
processes and their integration into single-wafer
processing module clusters.
January 3, 1996
Laboratory (MTL), is an interdisciplinary facility that supports
faculty research within the Institute of Technology to enhance its
threefold mission of education, research and industrial
November 16, 1995
The Penn State
Electronic Materials and Processing Research Laboratory (EMPRL) offers substantial
WWW information on its existing and new facilities, personnel, and programs.
November 9, 1995
- The Electronic Materials Research Group at the University of Washington has a major research
effort in the synthesis and characterization of electronic
materials from silicon to gallium nitride.
September 26, 1995
The Laboratory for the Integration of Sensors and Actuators (LISA) at the Universityof Montreal does research on MEMS, high speed devices on III-V heterostructures, opto-electronics, selective ionic membranes bases on Nasicon, and integrated gas sensors.
September 8, 1995
- The Solid State Electronics Laboratory at the University of Michigan provides information about the work of its III-V Integrated Devices and Circuits Group.
- The AMSTC at Auburn University provides information about its interdisciplinary efforts to advance microelectronics education and technology.
- The UC Davis Microfabrication Facility researches microelectronics, MEMs, and optoelectronics and explores new applications of these technologies.
August 6, 1995
The Center for
Solid State Electronic Research at Arizona State University is
a cross-disciplinary center with research in compound semiconductors,
nanostructures, silicon technologies, and ULSI modeling and design.
June 11, 1995
- Cornell University provides the Nanoline information server
describing fabrication services provided by the
Nanofabrication Facility as part of the
National Nanofabrication User Network (NNUN).
May 11, 1995
- RIT provides information about its Microelectronics research and facilities.
March 14, 1995
- The Facilities Subway was created because the Semiconductor
Subway has become large and unmanageable as a single subway.
This subway includes foundries and university facilities.
March 8, 1995
- CCSM is an NSF Engineering
Research Center located at the University of Illinois. Information
about their research in optoelectronics is available.
The Nanoelectronics Laboratory at the University of Cincinnati
provides information about its research at the nanometer scale in
semiconductors and other electronic materials.
March 6, 1995
The Electron Devices Research Group at Northeastern has an expanding network of
serving faculty and graduate students. Laboratory capabilities
currently include microfabrication, microwave materials fabrication
and characterization, plasma measurements and processing, noise
measurements, microwave device characterization, and VLSI design.
February 20, 1995
- This is an interdisciplinary
Microelectronics Research Center which provides information about its
research groups and interests.
February 16, 1995
- The Berkeley BCAM group was
formed to facilitate and improve semiconductor processing at the
equipment level with research in the areas of real-time equipment
control, multistep supervisory control, and IC design for
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