Past Semiconductor Conferences

• Tenth Canadian Semiconductor Technology Conference August 13-17, 2001, The Chbteau Laurier Hotel, Ottawa. Conference Chairs : Siegfried Janz, National Research Council and Suhit R. Das, Nortel Networks. Conference Manager : Marie Lanouette, Conference Services Office, National Research Council Canada; Tel. :(613) 993-0414; Fax : (613) 993-7250; Email: semi2001@nrc.ca; Website : www.sao.nrc.ca/ims/semi2001

• 2002 Materials Research Society Spring Meeting, Symposium I: Chemical-Mechanical Planarization, San Francisco, CA, April 1-5, 2002.

• Sixth International Workshop on Statistical Methodology for VLSI Design and Fabrication Sunday, June 10, 2001, Kyoto Japan. In conjunction with the 2001 Symposium on VLSI Technology.

• 2nd Advanced Equipment Control / Advanced Process Control (AEC/APC) Conference Europe April 19-20, 2001, Dresden, Germany. Topics include new sensors and measurement toosl, integration of metrology, equipment/process fault detection, control methods and software. Tutorials and reception will held on April 18, 2001.

• Fourth International Conference on Modeling and Simulation of Microsystems - MSM 2001 (as a joint meeting with the 2001 Int. Conf. on Computational Nanoscience ICCN 2001), to be held on March 19-21, 2001.

• AEC/APC Symposium XII, September 24-28, 2000, Caesars Palace, Lake Tahoe, Nevada. This symposium focuses on advanced equipment and process control.

• International Symposium on Semiconductor Manufacturing, This year's ISSM is scheduled for September 26-28 in Tokyo, Japan.

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), Boston, Massachussetts, Fairmont Copley Plaza, September 12 - 14, 2000.

• Fifth International Workshop on Statistical Metrology (IWSM 2000) in conjunction with the 2000 Symposium on VLSI Technology, Honolulu, Hawaii, June 11, 2000.

• 2000 International Conference on Characterization and Metrology for ULSI Technology will be held on June 26-29, 2000 at NIST in Gaithersburg, Maryland. The conference will bring together scientists and engineers interested in all aspects of th technology and characterization technics for silicon device research, development, manufacturing, and diagnostics.

• COTS MEMS - Advances in Applying Integrated Commercial Off-The-Shelf MicroElectroMechanical Systems, August 3-4, 2000, Berkeley CA, USA.

• The International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2000) will be held on May 10 - 12, 2000 in Tempe, Arizona. This year's MASM Symposium will be a forum for the exchange of ideas and best practices between researchers and practitioners from around the world involved in modeling and analysis. Also note that this year the Statistical Track of this conference replaces the annual Sematech Statistical Methods Symposium.

• 2'nd International Workshop on Challenges in Predictive Process Simulation (Wandlitz, Germany, 15-18 May 2000 ChiPPS'2000). ChiPPS is a series of interdisciplinary meetings aimed to bring together experts from three distinct fields: - fundamental materials science; - development of process simulation tools; and - manufacture of microelectronic devices. In particular, it serves as a bridge between those who study physical properties at the atomic scale and those who simulate technological processing steps at the macroscopic level.

• International Conference on Microelectronic Test Structures (ICMTS) is the premier conference devoted to the development, measurement and analysis of test structures providing a forum for designers and users of test structures to discuss recent developments and future directions. The meeting is a IEEE conference, sponsored by the IEEE Electron Devices Society.

• The 2000 International Reliability Physics Symposium (IRPS) will be held April 10-13, at the Fairmont Hotel In San Jose, CA. The Conference includes numerous Tutorials, Workshops, and over 65 Paper Presentations organized in various parallel sessions. Each session addresses a specific semiconductor device reliability concern. A panel of experts will discuss the topic "Is technology scaling limited by oxide reliability?" Early registration is until March 24.

• Sixteenth International VLSI Multilevel Interconnection (V-MIC) Conference, Sept. 6-10, 1999, Santa Clara Marriott Hotel, Santa Clara, CA. The conference objectives are to assemble researchers and technical support personnel from Industry, Universities and Government Laboratories to address all current and future issues related to on-chip ULSI Multilevel Interconnection.

• Diagnostic Techniques for Semiconductor Materials and Devices, Honolulu, Hawaii, 17-22 October 1999. Sponsored by The Electrochemical Society, The Electrochemical Society of Japan, and SPIE.

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), Boston, Massachussetts, Fairmont Copley Plaza, September 8 - 10, 1999.

• 12th Annual 1999 IEEE International ASIC/SOC Conference, "THE ROAD TO SYSTEM-ON-CHIP (SOC)", September 15-18, 1999, Washington, DC, DoubleTree Hotel National Airport, Sponsored by IEEE Solid State Circuits Society and IEEE Rochester Section.

• International Symposium on Semiconductor Manufacturing (ISSM), Santa Clara Marriott, CA, Oct. 11-13, 1999.

• International Interconnect Technology Conference (IITC), May 24-26, 1999, Burlingame, CA. The second annual IITC provides a forum for professionals in semiconductor processing, academia, and equipment development to present and discuss exciting new science and technology.

• Fourth International Workshop on Statistical Metrology (IWSM '99) in conjunction with the 1999 Symposium on VLSI Technology, Kyoto, Japan, June 12, 1999.

• 1999 Symposium on VLSI Technology, June 14-16, 1999, Kyoto, Japan. Note also that the 1999 Symposium on VLSI Circuits will also be held in the same location, June 17-19, 1999.

• Ab Initio Approaches to Microelectronic Materials and Process Modelling Symposium at the European Materials Research Society Spring Meeting, Strasbourg, France, June 1-4, 1999. Details for abstract submission.

• MSM 99, the second International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April 19-21, 1999, San Juan Marriott Resort & Stellaris Casino, San Juan, Puerto Rico, USA. MSM is an annual conference focusing on Modeling, Simulation and Scientific Computing in the Microelectronic, Semiconductor, Sensors and Actuators fields.

• 1st International Conference on Advanced Materials and Processes for Microelectronics, March 15-19, 1999 in San Jose, CA. Sponsored by the AVS.

• 1998 Manufacturing, Control, and Statistics Conferences (contributed by S. Butler, TI).

• IEDM '98 - 1998 IEEE International Electron Devices Meeting
  December 6-9, 1998, San Franciso Hilton, San Francisco, CA USA.

• ISSM '98 - Seventh International Symposium on Semiconductor Manufacturing
  October 7-9, 1998 at Hotel East 21 Tokyo, Tokyo, Japan.

• Advanced Semiconductor Manufacturing Conference (ASMC '98)
  September 23-25, 1998, Copley Plaza - Boston, MA.

• 1998 International Conference on Characterization and Metrology for ULSI Technology
  This Conference will bring together scientists and engineers interested in all aspects of the technology and characterization techniques for silicon device research, development, manufacturing, and diagnostics: chemical and physical, electrical, optical, in-situ, and real-time control and monitoring. The Conference is dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are needed by the semiconductor industry. The 1997 National Technology Roadmap for Semiconductors will be reviewed as a benchmark for all characterization and metrology needs. Revisions of the NTRS will be discussed, along with the 1997 Metrology Roadmap. The Conference will be held March 23-27, 1998, at NIST in Gaithersburg, Maryland.

• MSM '98 - First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April 6-8, 1998, Santa Clara Marriott, CA, USA. An Interdisciplinary Integrative Forum on Modeling, Simulation and Scientific Computing in the Microelectronic, Semiconductor, Sensors and Actuators fields.

• The aim of the International Integrated Circuit Conference (IIC '98) is to accelerate the acquisition of semiconductor ICs by offering Chinese design engineerrs the information they need to select and utilize state-of-the-art devices. Proposals are due by September 12, 1997; the conference is March 26-April 3. A description of the conference is available in postscript and pdf.

• Fourth International Workshop on Statistical Metrology
  To be held June 7, 1998, in association with the VLSI Technology Symposium in Honolulu, Hawaii.

• International Interconnect Technology Conference (IITC)
  June 1-3, 1998, Hyatt Regency, San Francisco Airport. The first annual IITC is sponsored by IEEE- Electron Device Society with the goal of becoming a premier conference for interconnect technology.

• Microlithography Symposium, Interface '97 November 9-11 in San Diego. The symposium features semiconductor industry leaders exchanging ideas and information on topics such as deep UV characterization and processing, advanced i-line lithography, the use of organic and inorganic antireflective coatings, advances in CMP technology, and other lithography and process innovations.

• SPIE Microelectronic Manufacturing Symposium, Sept. 28 - Oct. 2, 1997, Austin, TX.

• SISPAD '97 - 1997 International Conference on Simulation of Semiconductor Processes and Devices, September 8-10, 1997, Boston Marriott, Cambridge, Cambridge, MA USA.

• ASMC '97 - SEMI/IEEE Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), Hyatt Regency, September 10-12, 1997, Cambridge, MA.
  ASMC continues to be one of the most respected manufacturing conferences in the semiconductor industry -- offering practical solutions on improving the semiconductor manufacturing process. The conference focuses on methodologies used to achieve manufacturing excellence. The theme for the 1997 conference is The Quest for Semiconductor Manufacturing Excellence: Leading the Charge Into the 21st Century"

• Internaional Electronics Manufacturing Technology Symposium (IEMT), Austin TX, Oct. 14-16, 1996.

• Advanced Equipment Control/Advanced Process Control Workshop VIII (SEMATECH), Sante Fe NM, Oct. 27-30, 1996.

• Advanced Semiconductor Manufacturing Conference (ASMC '96), Cambridge MA, Nov.11-15, 1996.

• NAS Semiconductor Device Modeling Workshop, NASA Ames Research Center, March 28-29.

• First International Workshop on Statistical Metrology, June 9, 1996, in association with the VLSI Technology Symposium in Honolulu, Hawaii.

• NATO ASI, June 17-28, 1996, Chateau de Bonas, France. The ASI covers plasma processing of semiconductors, with emphasis on etching and on high-density plasmas.

• 187th Meeting of the Electrochemical Society, May 21-26, 1995 in Reno, Nevada. Of special interest is the session on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing I.

• Advanced Semiconductor Manufacturing Conference, November 13-15, 1995, in Cambridge, MA.

• 1995 American Control Conference, Seattle WA, June 21-23, 1995. Of particular interest is the workshop on Control of Semiconductor Manufacturing Processes, held on Tuesday, June 20.

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Maintained by Duane Boning.
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