Using MTL » Fabrication

Lab Facilities - Overview

• Integrated Circuits Lab (ICL) - 2nd floor
  • Class 10
  • Si, 6" wafers
  • CMOS-compatible
  • MEMS, VLSI
  • CMOS baseline:
  • Characterize processes & equipment
  • Provide unit steps for new processes
• Technology Research Lab (TRL) - 4th floor
  • Class 100
  • Si, compound semiconductors, quartz
  • Non-standard wafer size (including pieces)
  • Au processes allowed, but segregated.
• Exploratory Materials Lab (EML) - 5th floor
  • Class 10,000
  • Non-standard wafer size (including pieces)
  • Many materials (eg, plastics, ceramics)
• Transferring wafers (in general):
  • "Controlled" Outside Labs : piranha clean (x2)
  • EML or "Uncontrolled" Outside Labs : no transfer back to TRL or ICL

Note: Before diffusion processes, must do RCA clean

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Building Floor Plans

These are all downloadble PDF files (MIT Facilities).

Building 39, Floor 2
Building 39, Floor 3
Building 39, Floor 4
Building 39, Floor 5
Building 39, Floor 6

To download CAD schematics, visit the Facilities website.

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Mode of Operation

Fab Operating Hours:
Mon - Thurs: 8:00am - 9:00pm
Fri: 8:00am - 6:00pm
Note: Toxic gases are shut off approx. 1/2 hour beflore closing

Two staff members on duty after 5PM
They can be reached by calling the "Chemicals" phone: 857-998-1916

Identicard
Access tailored to process needs

All-call Pager (broadcast to intercoms. in labs)
Dial x8-9656.

Process Technology Committee (PTC)

The PTC is composed of  4 faculty, 4 students (who serve for 1 year), 1 rotating specialist and the Assoc. Director of Operations, who chairs it.

It meets weekly to review and approve new ICL and TRL processes as well as all 24-hr status requests.

24-hr Users

After becoming fully familiar with the fabs and their operation, users can request 24-hr status by sending a note to the PTC. If staff input on the request is positive, the PTC will conduct a brief interview with the applicant. If the request is approved, 24-hr status will allow the user to access the fab when there is no staff on duty, for doing processes that do not use toxic gases. There must be at least two 24-hr-qualified users (serving as buddy to each other) in the same fab at all times.

24-hr status is a privilege that can be revoked at any time for safety or fab protocol violations.

Training

• For each machine needed, see the Specialist in charge (See Training Chart)
• Consult Standard Operating Procedures (SOPs)

Charges

• Monthly lab Identicard fee $10.00
• Process charges: See Machine Charge Chart
• Computer account ~$30
• Wafer purchase market price

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General Fab. Procedures

Getting a Process Started

To get a process started, a user:

• Designs the process
• Gets input from relevant Specialists, Associate Dir. Ops.
• Gets PTC approval (unless the process is to be done in EML)
• Contacts relevant Specialists to get pre-qualified on tools as needed
• Makes CORAL reservations
• Gets trained on machines as needed

For Equipment Problems

• Enter a Problem Report in CORAL
• Change machine status if necessary

For Process problems:

See the relevant Specialists and/or the Associate Dir. Ops.

New chemistry proposals:

To introduce a new chemical into the labs, submit the MSDS to both the PTC and the EHS Coordinator.

Research Results:

Submit a copy to the MTL Memo Series (39-315) of preprints or reprints and theses.

Acknowledgement:

“This work was carried out in part through the use of MIT’s Microsystems Technology Laboratories”

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Code of Conduct

• Respect shared resources
• Don't abuse reservations
• Clean up after yourself
• Promptly report problems
• Follow proper safety procedures for chemicals and equipment
• Respect the importance of other people's processes
• Follow general lab guidelines
• Use CORAL to report machine problems
• Get trained on equipment by lab staff
• Submit new and modified processes to the PTC for approval
• If you are unsure about something, ask the staff or students
• Be aware of what is going on around you
• You can communicate with other users by sending e-mail to fab-users@mtl.mit...

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Machine Charge Chart

Viewable here - following this link will open up the Machine Charge Chart in a new window.

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Fabrication

• Overview
• Facilities
• Becoming an MTL Fab User
  • Registering as an MTL User
• MUMMS
• CORAL
• Outreach Program
• Fabrication Facilities Access
• MTL Orientation
• Fast Facts for Fab Users
• Machine Charge Chart
• Equipment List
• SOPs
  • ICL
  • TRL
  • EML
  • Other Lab SOPs
• Etch Tool Summary Chart
• Training Chart
• PTC Process Matrix
• Emergency Preparedness Guide
• Chemical Hygiene Plan
• Technical Staff Only

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