Using MTL » Fabrication

Fab Facilities - Overview

• Integrated Circuits Lab (ICL) - 2nd floor
  • Class 10
  • Si, 6" wafers
  • CMOS-compatible
  • MEMS, VLSI
• Technology Research Lab (TRL) - 4th floor
  • Class 100
  • Si, compound semiconductors, quartz
  • Non-standard wafer size (including pieces)
  • Au processes allowed, but segregated.
• Exploratory Materials Lab (EML) - 5th floor
  • Class 10,000
  • Non-standard wafer size (including pieces)
  • Many materials (eg, plastics, ceramics)

Fabrication

• Overview
• Facilities
• Becoming an MTL Fab User
  • Registering as an MTL User
• MUMMS
• CORAL
• Outreach Program
• Fabrication Facilities Access
• MTL Orientation
• Fast Facts for Fab Users
• Machine Charge Chart
• Equipment List
• SOPs
  • ICL
  • TRL
  • EML
  • Other Lab SOPs
• Etch Tool Summary Chart
• Training Chart
• PTC Process Matrix
• Emergency Preparedness Guide
• Chemical Hygiene Plan
• Technical Staff Only

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