Microsystems Technology Laboratories

Using MTL » Fabrication » Standard Operating Procedures

IN EML
MACHINE NAME	IT DOES:	AREA:
asher	plasma PR stripper
CVC	thermal evaporator	vacuum deposition
dektak	mechanical surface profilometer
e-beam	e-beam evaporator	vacuum deposition
KS Aligners	mask aligner
OxidationTube	CMOS oxidation furnace	diffusion
plasmatherm	PECVD-RIE	plasma etch
sputtererAJA	thin film deposition
anneal-furnace	tube anneal furnace	diffusion

 

Fabrication

• Overview
• Facilities
• Becoming an MTL Fab User
  • Registering as an MTL User
• MUMMS
• CORAL
• Outreach Program
• Fabrication Facilities Access
• MTL Orientation
• Fast Facts for Fab Users
• Machine Charge Chart
• Equipment List
• SOPs
  • ICL
  • TRL
  • EML
  • Other Lab SOPs
• Etch Tool Summary Chart
• Training Chart
• PTC Process Matrix
• Emergency Preparedness Guide
• Chemical Hygiene Plan
• Technical Staff Only