Microsystems Technology Laboratories

AG Associates’ 8108 in ICL is a rapid thermal processing system configured for 6-inch silicon.
The RTP system is capable of running at the following parameters:
- Temperature range 400-1150°C
- Temperature accuracy +-5°C
- Ramp up rate 10-200°C/sec
- Max ramp down rate 150°C/sec
- Pressure 1 Atm
- Gases N₂, O₂, N₂O, NH₃, Ar

The RTP system is run using a standard recipe library. Processes include:
- N2 Anneal
- Dry Oxidation (Time limited)
- Nitridation

Note: If your PTC approved process requires variation from these standard recipes, new recipes can be created to suit your needs.

NH₃, N₂O –The Material Safety Data Sheet for NH3 can be found in the yellow MSDS binders in the copier room of building 39.
The system is equipped with safety interlocks at both the hardware and software level to minimize NH3 related hazardous events.
Users of the equipment should be aware that the quartz ware associated with the system may be quite hot and should avoid direct contact with these parts.

1. Check equipment reservation in Coral to insure that you reserved the correct machine in the correct facility for the correct date. Another user may have reservations; it is your responsibility to honor them if this is the case.
2. Use Coral to “engage” the machine. You must perform this step before proceeding or the machine will not allow you to proceed.
3. Load your wafers.
   1. On the front of the tool, use the “UP” arrow to raise the front window.
   2. Remove the RTP dedicated cassette from the right hand cassette holder.
   3. Transfer your wafers in to the RTP dedicated cassette.
   4. Place the RTP dedicated cassette with your wafers to be run on the right hand cassette holder. Ensure the round white light on the panel under the cassette holder illuminates, indicating that the cassette is on the holder properly.
   5. Ensure the second RTP dedicated empty cassette is positioned on the left cassette holder. Ensure the round white light on the panel under the cassette holder illuminates, indicating that the cassette is on the holder properly.
   6. Visually ensure there are no other wafers in any of the other stations. (The system will also perform a search to ensure no other wafers are present.)
   7. On the front of the tool, use the “DOWN” arrow to lower the front window.
4. Start your process.
1. In the main screen of the AG Software select the RUN button.
2. The run window will load and a separate window will appear asking you to select the recipe you wish to run.
3. Select the recipe you want to run from the list and click on the “OK” button.
4. Once the recipe has finished downloading, click on the “START” button on the lower left of the screen.
5. You will be prompted to enter a data log file name. Enter a file name using the on screen keyboard that appears and then click “OK”.
6. Allow the tool to run the recipe until a window pops up indicating “Cycle Complete”
7. Click on “OK”
8. Click on “EXIT” in the lower right part of the screen.
5. Unload your wafers.
   1. On the front of the tool, use the “UP” arrow to raise the front window.
   2. Remove the RTP dedicated cassette with your wafers from the left hand cassette holder.
   3. Transfer the wafers from the RTP dedicated cassette to your cassette.
   4. Replace the RTP dedicated cassette on the left hand cassette holder. Ensure the round white light on the panel under the cassette holder illuminates, indicating that the cassette is on the holder properly.
   5. Visually ensure there are no other wafers in any of the other stations.
   6. On the front of the tool, use the “DOWN” arrow to lower the front window.
6. Use Coral to “disengage” the machine. Be sure to input any required data.