Using MTL » Fabrication

Training Chart

ICL

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Etch

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Wet

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CMP

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Packaging

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Metrology

 

TRL

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Deposition

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Diffusion

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Photo

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Wet

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Metrology

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Etch

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PECVD-RIE

 

EML

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See Kurt Broderick


ICL

Tool

Primary Trainer

Secondary Trainer

Diffusion-ICL

Tubes 5A-D

Bernard Alamariu

Eric Lim

Tubes 6A-D

Bernard Alamariu

Eric Lim

RTA2

Bernard Alamariu

Eric Lim

RTP

Bernard Alamariu

Eric Lim

VTR

Bob Bicchieri

Kris Payer

rca-ICL

Bernard Alamariu

Eric Lim

 

 

 

Photo-ICL

HMDS-ICL

Paul Tierney

Dan Adams

asher-ICL

Paul Tierney

Bob Bicchieri

coater6

Paul Tierney

Dan Adams

i-stepper

Paul Tierney

Dan Adams

Etch-ICL

AME5000

Eric Lim

Donal Jamieson

LAM490B

Bob Bicchieri

Eric Lim / Bob Bicchieri

LAM590-ICL

Eric Lim

Bob Bicchieri

rainbow

Eric Lim

Bob Bicchieri

 

 

 

Deposition-ICL

DCVD

Paudely Zamora

Eric Lim

concept1

Paudely Zamora

Eric Lim / Bob Bicchieri

eBeamCMOS

Paudely Zamora

Eric Lim

endura

Paudely Zamora

Eric Lim

ALD Donal Jamieson Paudely Zamora

 

 

 

Metrology-ICL

4-pt-probe

Bernard Alamariu

Eric Lim

P10

Bernard Alamariu

Eric Lim

SCA

Bernard Alamariu

Eric Lim

UV1280

Bernard Alamariu

Eric Lim

cv

Bernard Alamariu

Eric Lim

AFM

Bernard Alamariu

Eric Lim

wykoICL

Bernard Alamariu

Eric Lim

semZeiss Paul Tierney Eric Lim

 

 

 

Wet-ICL

TMAH-KOHhood

Kurt Broderick

Dave Terry

nitrEtch-HotPhos

Paul Tierney

Bob Bicchieri

oxEtch-BOE

Paul Tierney

Bob Bicchieri

plating-bench

Dan Adams

Tim Turner

premetal-Piranha

Paul Tierney

Dan Adams

 

 

 

CMP-ICL

CMP

Dan Adams

Tim Turner

GnP

Dan Adams

Tim Turner

 

 

 

Packaging-ICL

diesaw

Dan Adams

Tim Turner

goldwire

Dan Adams

Tim Turner

 

 

 

TRL

Deposition-TRL

PZTcoater

Dennis Ward

Dave Terry

PZTfurnace

Dennis Ward

Dave Terry

eBeam Paudely Zamora Tim Turner

eBeamAu

Dave Terry

Paudely Zamora

parylene

Dennis Ward

Dave Terry

perkin-elmer

Eric Lim

Bob Bicchieri

STS-CVD

Donal Jamieson

Bob Bicchieri

 

 

 

Diffusion-TRL

Tubes A1-4

Bernard Alamariu

Eric Lim

Tubes B1-4

Bernard Alamariu

Eric Lim

rca-TRL

Bernard Alamariu

Eric Lim

rta35

Bernard Alamariu

Eric Lim

 

 

 

Photo-TRL

EV1

Paul Tierney

Dave Terry

EV501

Dennis Ward

Dave Terry

EV620

Dennis Ward

Dave Terry

HMDS-TRL

Dave Terry

Kurt Broderick

Heidelberg

Dennis Ward

Paul Tierney

SAMCO Eric Lim Bob Bicchieri

SU8oven

Dennis Ward

Dave Terry

SU8spinner

Dennis Ward

Dave Terry

TBM-8

Dennis Ward

Dave Terry

asher-TRL

Dave Terry

Paul Tierney

coater

Dave Terry

Paul Tierney

MA-6

Dave Terry

Paul Tierney

postbake

Dave Terry

Paul Tierney

prebakeovn

Dave Terry

Paul Tierney

varTemp

Dave Terry

Paul Tierney

 

 

 

Wet-TRL

Solvent-noAu

Paul Tierney

Dave Terry

acid-hood

Paul Tierney

Dave Terry

acid-hood2

Paul Tierney

Dave Terry

photo-wet-Au

Paul Tierney

Dave Terry

photo-wet-l

Paul Tierney

Dave Terry

photo-wet-r

Paul Tierney

Dave Terry

 

 

 

Metrology-TRL

FLX

Dennis Ward

Bernard Alamariu

IV-probe

Bernard Alamariu

Dave Terry

WYKO

Bernard Alamariu

Dave Terry

dek-noAu

Bernard Alamariu

Dave Terry

dektak

Dave Terry

Paul Tierney

ellipsometer-TRL

Dave Terry

Paul Tierney

hp-probe

Dave Terry

Paul Tierney

keithley

Dave Terry

Paul Tierney

nanospec

Dave Terry

Paul Tierney

 

 

 

Etch-TRL

UVozone-noAu

Dave Terry

Paul Tierney

XeF2

Bob Bicchieri

Dennis Ward

sts1

Donal Jamieson

Dennis Ward

sts2

Donal Jamieson

Dennis Ward

sts3

Donal Jamieson

Dennis Ward

LAM590 Bob Bicchieri Eric Lim

plasmaquest

Bob Bicchieri

Eric Lim

 

 

 

PECVD-RIE-TRL

Fabrication

MTL Annual Research Report 2012: View Online