MTL Annual Research Report 2011

Figure 2: Channel electron mobility versus the charged defect density. The blue diamond symbol and the green square symbol indicate the measured mobility for structure with CVD Al₂O₃/InGaAs interface and ALD Al₂O₃/InGaAs interface, respectively. The magenta and red dots indicate the mobility limited by coulomb scattering and phonon scattering, respectively, and the black “+” symbols indicate the simulated final mobility.