Figure 1

Figure 1: An optical microscopy image of the pressure sensor fabricated using the contact lift-off mesa-transfer process. The gold parallelogram is the pressure sensor. About 1024 circular cavities are covered by this parallelogram gold membrane, which is 140 nm thick. The underlying PDMS on ITO-Glass is patterned with 25-µm- diameter circular cavities with about 5-µm to 7-µm spacing between the circles.

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    Akintunde Akinwande Anantha Chandrakasan Brian Wardle Carlijn Mulder Carl Thompson Caroline Ross Charles Sodini Chih-Hao Chang CICS Clifton Fonstad Dana Weinstein Dimitri Antoniadis Duane Boning Eugene Fitzgerald Faraz Najafi Francesco Marsili George Barbastathis Hae-Seung Lee Harry Tuller Ichiro Masaki Jason Sussman Jeffrey Lang Jesus del Alamo Jing Kong Joel Dawson Joel Voldman Jongyoon Han Judy Hoyt Karen Gleason Karl Berggren Lan Wei Luca Daniel Luis Velásquez-García Marc Baldo Omar Mysore Philip Reusswig Rajeev Ram Sang-Gook Kim Sangeeta Bhatia Scott Manalis Sean Bishop Tomas Palacios Vitor Manfrinato Vladimir Bulovic Vladimir Stojanovic