Figure 2
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Figure 2: (a) Projection plot of trajectories for incident particles and their SEs, for helium-ion and electron beams, in 12-nm-thick HSQ on Si. To reduce calculation time and to focus attention on the short-range effects on feature size such as forward scattering and SE range, the Si layer is a 36-nm-thick membrane rather than a bulk substrate. The image is cropped at the base of the resist layer for clarity. (b) Simulated PSFs in 12-nm-thick HSQ on bulk Si for each of the four beams in (a): 30 keV He+ (diamonds), 30 keV e- (triangles), 10 keV e- (squares), and 5 keV e- (x’s).