Figure 2
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Figure 2: FEG-SEM micrograph of a hexalayer composed of three SiOx –like / SiOxCyHz dyads. The dark layers are iCVD SiOxCyHz, and the bright ones are PECVD SiOx-like.
Figure 2: FEG-SEM micrograph of a hexalayer composed of three SiOx –like / SiOxCyHz dyads. The dark layers are iCVD SiOxCyHz, and the bright ones are PECVD SiOx-like.