Electromechanical resonators such as quartz crystals, surface acoustic wave (SAW) resonators, and ceramic resonators have become essential components in electronic…
Micro Electromechanical Systems (MEMS) technology and devices for RF and mm-wave wireless communication, frequency sources, and sensing applications. MEMS-CMOS hybrid devices and systems. Novel MEMS transduction mechanisms to enable high efficiency, high frequency operation.
Two of the greatest challenges in MEMS are those of packaging and integration with CMOS technology. Development of unreleased MEMS…