yang_arrays_02

Figure 2: (a) Fabrication process of the gold optical-field emitters. The process starts from a Si wafer. A thin SiO2 layer is grown, preventing electron emission from bulk Si. Electron beam lithography and etching produces a patterned oxide layer. Au deposition and PMMA lift-off allows creation of Au “bullet” arrays. The aspect-ratio of the emitters depends on the Au deposition time. The Si substrate can be electrically grounded to serve as an electron reservoir, or connected to a DC bias to perform electron emission induced by a combination of electrostatic field and optical field stimulation. (b) SEM image of a Au dot array. An oxide layer was not deposited on this sample and the gold dots (aspect-ratio of 1) are deposited directly on the Si wafer. The diameter of each gold dot is 10 nm and the dot pitch is 30 nm. A total of 100 Au dots are packed within an area of less than 0.1 μm2.