nicaise_blockcopoly_01

Figure 1: Schematic of the major steps of the method for the directed self-assembly using a removable template with an etchable-block brush. (Step 1) fabrication of the templates using EBL, a PMMA resist, (Step 2) functionalizing the templates with a PS brush, (Step 3) spin coating and annealing of the BCP, and (Step 4) removing the PS matrix and the PMMA template using oxygen RIE.

  • Tags

    ahmed al-obeidi akintunde akinwande anantha chandrakasan brian wardle carl thompson caroline ross center for excitonics charles sodini clifton fonstad dana weinstein dimitri antoniadis duane boning eugene fitzgerald farnaz niroui frances hill gallium nitride gang chen graphene hae-seung lee harry tuller healthcare iii-v materials jeffrey lang jesús del alamo jing kong joel voldman jongyoon han judy l. hoyt karl berggren lionel kimerling luca daniel luis velasquez-garcia marc baldo mildred dresselhaus pablo jarillo-herrero pao lin patrick brown qing hu sang-gook kim silvija gradecak tomas palacios vladimir bulovic vladimir stojanovic yu-chung hsiao zohaib mahmood