Fonstad_3d_Electrode_Arrays-02

Figure 2:  A close-up scanning electron micrograph of a portion of the array in Figure 1. The needles are thinned to 40 µm and are spaced 400 µm center-to-center in each linear array. The linear arrays are spaced at 600 µm.  The above structure was fabricated using 300-µm thin wafers.