This work presents the first hybrid RF MEMS-CMOS resonators demonstrated in silicon at the transistor level of IBM’s 32-nm SOI…
Design and optimization of novel RF Nano-Electro-Mechanical (NEM) resonators such as Resonant Body Transistors (RBT) require modeling across multiple domains,…
Electromechanical resonators such as quartz crystals, surface acoustic wave (SAW) resonators, and ceramic resonators have become essential components in electronic…
Micro Electro-Mechanical Systems (MEMS), electromechanical transducers, phononic crystals for resonators and signal processing, MEMS sensors. Radio frequency resonators and oscillators for wireless communication and clocking. Fabrication of MEMS.