liu_integration_02

Figure 2: TLM results of the ohmic contact for AlGaN/GaN HEMTs. (a) Ti/Al/Ni/Au with RTA at 800°C; (b) Ti/Al/Ni/Pt with RTA at 950°C; and (c) Ti/Al/Ni/Pt with 20-nm recess and RTA at 950°.

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