category » MEMS & BioMEMS

Magnetically-assisted Assembly, Alignment, and Orientation of Micro-scale Components
  • The use of magnetic forces to improve fluidic self-assembly of micro-components has been investigated using Maxwell 3D to model the…


Batch-Microfabricated RPA for Ion Energy Measurements
  • Plasma diagnostic tools are required in numerous fields, from experimental physics to aerospace and beyond.  Various sensors exist to capture…


Electro-chemical Stimulation of Neuromuscular Systems Using Ion-selective Membranes
  • Spinal cord injury (SCI) leads to paralysis, decrease in quality of life, and high lifetime medical costs. Direct nerve functional…


Designing Complex Digital Systems with Scaled Nano-electro-mechanical Relays
  • Silicon CMOS circuits have a well-defined lower limit on their achievable energy efficiency due to sub-threshold leakage. Once this limit…


Tunneling Nanoelectromechanical Switches Based on Organic Thin Films
  • With the silicon-based electronics reaching physical limits that inhibit continued improvements in device performance, much research has been directed towards…


Microfluidic Electronic Detection of Protein Biomarkers
  • Immunoassays use antibodies to detect protein biomarkers, with a substantial global market and significant importance for clinical practice. However, traditional…


Micron- and Submicron-thick Parylene Substrates for Transfer Printing and Solar Applications
  • Transfer printing of thin metal films enables the fabrication of both planar and suspended membrane electrodes for microelectromechanical (MEMS) sensors…


Wide-bandwidth, Low-frequency, Low-g Piezoelectric MEMS Energy Harvesters
  • Our group proposes the piezoelectric energy harvester based on a nonlinear resonator to address the narrow bandwidth issue of conventional…


Hydrophobic Rare-earth Oxide Ceramics with Applications to Sustained Dropwise Condensation
  • Hydrophobic materials that are robust to harsh environments are needed in a broad range of applications[1][2][3]. Although durable materials such…


Stretchable Pressure- and Shear-sensing Skin Printed from PDMS
  • In the fields of robotics and prosthesis design, there is need for inexpensive, wide-area pressure- and shear-sensing arrays that can…


Design and Fabrication of Magnetically Tunable Microstructured Surfaces
  • Micro- and nanostructured surfaces have broad applications ranging from liquid transport in microfluidics and cell manipulation in biological systems to…


Scalable 3-D Microelectrode Recording Architectures for Charac-terization of Optogenetically Modulated Neural Dynamics
  • Optogenetics is commonly used for precision modulation of the activity of specific neurons within neural circuits[1], but assessing the impact…


Waveguide Micro-probes for Optical Control of Excitable Cells
  • Optogenetics is the safe, effective delivery of light-gated membrane proteins to neurons and other excitable cells (e.g., muscle, immune cells,…


Aligned CNT-based Microstructures and Nano-engineered Composite Macrostructures
  • Carbon nanotube (CNT) composites are promising new materials for structural applications thanks to their mechanical and multifunctional properties. We have…


Nanoporous Elements with Layer-by-layer Assembly in MEMS with a Focus on Microfluidic Bioparticle Separation
  • We have integrated ultra-porous (99% porous) elements (nanoporous forests of vertically aligned carbon nanotubes (VACNTs)) in MEMS, showing their use…


MEMS-enabled Tactile Displays for the Blind and Visually Impaired
  • According to the World Health Organization, more than 285 million people have visual impairments worldwide, and 39 million of those…


Deep Trench Capacitor Drive of Unreleased Si MEMS Resonator
  • With frequency-quality factor products (f•Q) often exceeding 1013, MEMS resonators offer a high-Q, small footprint alternative to conventional LC tanks…


Development of Porous Piezoresistive Materials and Its Applications for Underwater Pressure Sensors and Tactile Sensors
  • Microelectromechanical system (MEMS) pressure sensor arrays are gaining attention in the field of underwater navigation because they are seen as…


Continuous RBC Removal Using Spiral Channel with Trapezoidal Cross-section
  • Red blood cells (RBC) are the most abundant cell component in many biological fluids, including blood, bone marrow aspirate, and…


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Mechanisms for Intrinsic Stress Evolution during Deposition of Polycrystalline Films
  • Complex kinetic processes are involved during the growth of polycrystalline films, which is typically carried out far from equilibrium. Minor…


MEMS Pull-in and Lift-off Simulation Using Continuation Methods
  • The voltages at which MEMS actuators and sensors become unstable, known as pull-in and lift-off voltages, are critical parameters for…


Preventing Catastrophic Failures: Nano-engineered Multi-physics Materials for Structural Applications
  • Catastrophic structural failures cause many physical and personal losses, with prevention estimated at billions of dollars in savings each year….


Thin Film Piezoelectric Micro-machined Ultrasonic Transducer for Medical Imaging
  • Ultrasound is an attractive 3D medical imaging technique because it is relatively inexpensive, portable, compact, and non-invasive. However, for 3D…


Erythrocyte Deformability Correlates to Intracellular Calcium Level
  • Elevated intracellular calcium level ([Ca++]i) and reduced deformability  in red blood cells (RBCs) are commonly associated with blood-related diseases[1][2][3] as…


Quantifying Particle Coatings Using High-precision Mass Measurements
  • Microparticles are currently used in a variety of industrial and biomedical applications and are often coated with different materials to…


Thermal Ink Jet Printing of CNT films
  • Ink jet printing allows for rapid, scalable, and low-cost patterning process. It does not need a vacuum environment or toxic…


Automated Parameterized Dynamical Modeling of RF MEMS Resonators
  • Design and optimization of novel RF micro-electro-mechanical system (MEMS) resonators such as resonant body transistors (RBT) require modeling across multiple…


Contact-printed MEMS Membranes
  • It is desirable to extend the functionality of MEMS to different form factors including large-area arrays of sensors and actuators,…


Switchable Piezoelectric Transduction in AlGaN/GaN MEMS Resonators
  • High-Q MEMS resonators, with small footprint and monolithic integration, are excellent building blocks for configurable RF systems. While these resonators…


Iso-dielectric Separation of Cells and Particles
  • The development of new techniques to separate and characterize cells with high throughput has been essential to many of the…


A Microfluidic ‘‘Baby Machine’’ for Cell Synchronization
  • Common techniques used to synchronize eukaryotic cells in the cell cycle often impose metabolic stress on the cells or physically…


High-throughput Electrospinning of Nanofibers from Batch-microfabricated Arrays
  • Nanofibers’ unique morphological properties promise to make them a key engineering material across many disciplines.  In particular, the large specific…


Impact of SiNx Passivation on IDS,max of AlGaN/GaN HEMTs
  • Dielectric films such as SiNx, SiO2, and Al2O3 play key roles in AlGaN/GaN heterostructure field-effect transistors (HFETs) both as surface…


Cell Pairing for Studying Immunity
  • Cell-cell interactions are crucial for proper functioning of the immune system because direct cell-cell contacts largely govern the successful progression…


Electrokinetic Control of Axonal Growth
  • Dynamic control of axonal outgrowth holds the potential to establishing a range of in-vivo and in-vitro applications including perpiheral nerve…


A Novel Microfluidic “Cell-based” Blood Dialysis Platform for Septic Murine Model
  • Sepsis is an adverse systemic inflammatory response caused by microbial infection in blood. We have reported a microfluidic approach for…