HV MEMS Packaging

Electrode assembly regionWe have developed a MEMS packaging technology that relies on mesoscaled DRIE-patterned deflection springs to integrate electrostatic lenses to massive arrays of high-voltage devices with great precision and repeatability. | Read more...

Chemical Reactors

Singlet oxygen generator Scaling-down and multiplexing chemical reactors (for example, the MEMS singlet oxygen generator shown) increase their efficiency, enabling a wide range of portable applications.   | Read more...

Quadrupole Mass Filters

quadrupole mass filter Evolutionary road of miniaturized QMFs to achieve high performance and batch fabrication | Read more...

High Current Electron Sources

Massive arrays of individually ballasted field emitters are the key to implement reliable high-current cathodes. Read more...

Carbon Nanotube Field Devices

Carbon nanotubes can be used to produce localized high electrostatic fields with low voltage, opening the doors to many exciting applications such as portable gas ionizers. Read more...

Multiplexed Electrospray

Multiplexed electrospray has tremendous potential in a wide range of exciting applications, e.g., manufacturing, analytical instruments, and nanosatellite propulsion. Read more...

News

Paper by Velasquez Group receives recognition by the IEEE Journal of Microelectromechanical Systems

The paper “High-Throughput Ionic Liquid Ion Sources Using Arrays of Microfabricated Electrospray Emitters with Integrated Extractor Grid and Carbon Nanotube Flow Control Structures”, by F. A Hill, E. V. Heubel, P. Ponce de Leon, and L. F. Velásquez-García was selected as one of the three JMEMS RightNow Papers of the October 2014 issue of the
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MIT News: Fast, cheap nanomanufacturing Arrays of tiny conical tips that eject ionized materials could fabricate nanoscale devices cheaply.

Luis Fernando Velásquez-García’s group at MIT’s Microsystems Technology Laboratories (MTL) develops dense arrays of microscopic cones that harness electrostatic forces to eject streams of ions. The technology has a range of promising applications: depositing or etching features onto nanoscale mechanical devices; spinning out nanofibers for use in water filters, body armor, and “smart” textiles; or
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Our Work on electrospray emitter array ion sources is on the cover of the 2014 MTL Annual Review!

Congratulations to Frances! More information in http://www-mtl.mit.edu/wpmu/ar2014/  

ILP Institute Insider: Mass Spectrometry in Your Hand Electrospray arrays can dramatically downsize systems and costs for onsite chemical analysis — and many other applications.

If you’re out in the field doing environmental testing, food checks, forensic work or other chemical analysis, mass spectrometry is an extremely accurate detection tool with one huge drawback: You can lose days in sending samples back to the lab for analysis. MIT researchers now have developed technologies that promise to enable mass spectrometers that
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Our X-Ray work is featured in IEEE Spectrum!

Our work on advanced X-ray generators was featured in the March 2014 issue of the magazine IEEE Spectrum, in the article “Less Is More With Next-Generation Medical X-rays” by Mark Anderson.  The X-ray that imaged your father’s broken leg when he was a kid isn’t fundamentally different from the one at your doctor’s office today—other than that
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