HV MEMS Packaging

Electrode assembly regionWe have developed a MEMS packaging technology that relies on mesoscaled DRIE-patterned deflection springs to integrate electrostatic lenses to massive arrays of high-voltage devices with great precision and repeatability. | Read more...

Chemical Reactors

Singlet oxygen generator Scaling-down and multiplexing chemical reactors (for example, the MEMS singlet oxygen generator shown) increase their efficiency, enabling a wide range of portable applications.   | Read more...

Quadrupole Mass Filters

quadrupole mass filter Evolutionary road of miniaturized QMFs to achieve high performance and batch fabrication | Read more...

High Current Electron Sources

Massive arrays of individually ballasted field emitters are the key to implement reliable high-current cathodes. Read more...

Carbon Nanotube Field Devices

Carbon nanotubes can be used to produce localized high electrostatic fields with low voltage, opening the doors to many exciting applications such as portable gas ionizers. Read more...

Multiplexed Electrospray

Multiplexed electrospray has tremendous potential in a wide range of exciting applications, e.g., manufacturing, analytical instruments, and nanosatellite propulsion. Read more...

News

Our Work on 3D-printed coaxial electrospray droplet sources is on the cover of the 2016 MTL Annual Review!

Congratulations Daniel! More information on http://www-mtl.mit.edu/research/ar2016.html 

MIT News (December 2015): Nanodevices at one-hundredth the cost – New techniques for building microelectromechanical systems show promise

Microelectromechanical systems — or MEMS — were a $12 billion business in 2014. But that market is dominated by just a handful of devices, such as the accelerometers that reorient the screens of most smartphones. That’s because manufacturing MEMS has traditionally required sophisticated semiconductor fabrication facilities, which cost tens of millions of dollars to build.
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Our work on advanced X-ray sources is featured in the front page of Scientific American!

The article was written for the version in Spanish of the prestigious magazine (Scientific American – Español). The article is in the first page of the website of the magazine during the week of June 20, 2015. The article (written in Spanish) can be found here. June 19, 2015

Anirban and Philip selected to give presentations at Transducers 2015

Anirban Basu and Philip Ponce de Leon have been selected to give presentations at The 18th International Conference on Solid-State Sensors, Actuators and Microsystems in Anchorage, Alaska, June 21-25, 2015. Anirban will present “Nanostructured Silicon Field Emitter Array-Based High-Vacuum Magnetic-less Ion Pump for Miniaturized Atomic Spectroscopy Sensors”. Philip will be presenting “High-Throughput Manufacturing of Polymer Nanofibers
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Paper by Velasquez Group on nanofiber generators receives recognition by the IEEE Journal of Microelectromechanical Systems

The paper “Low-Bremsstrahlung X-Ray Source Using a Low-Voltage High-Current-Density Nanostructured Field Emission Cathode and a Transmission Anode for Markerless Soft Tissue Imaging”, by S. Cheng, F. A Hill, E. V. Heubel, and L. F. Velásquez-García was selected as one of the three JMEMS RightNow Papers of the April 2015 issue of the IEEE Journal of
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