HV MEMS Packaging

Electrode assembly regionWe have developed a MEMS packaging technology that relies on mesoscaled DRIE-patterned deflection springs to integrate electrostatic lenses to massive arrays of high-voltage devices with great precision and repeatability. | Read more...

Chemical Reactors

Singlet oxygen generator Scaling-down and multiplexing chemical reactors (for example, the MEMS singlet oxygen generator shown) increase their efficiency, enabling a wide range of portable applications.   | Read more...

Quadrupole Mass Filters

quadrupole mass filter Evolutionary road of miniaturized QMFs to achieve high performance and batch fabrication | Read more...

High Current Electron Sources

Massive arrays of individually ballasted field emitters are the key to implement reliable high-current cathodes. Read more...

Carbon Nanotube Field Devices

Carbon nanotubes can be used to produce localized high electrostatic fields with low voltage, opening the doors to many exciting applications such as portable gas ionizers. Read more...

Multiplexed Electrospray

Multiplexed electrospray has tremendous potential in a wide range of exciting applications, e.g., manufacturing, analytical instruments, and nanosatellite propulsion. Read more...

News

Our work on advanced X-ray sources is featured in the front page of Scientific American!

The article was written for the version in Spanish of the prestigious magazine (Scientific American – Español). The article is in the first page of the website of the magazine during the week of June 20, 2015. The article (written in Spanish) can be found here. June 19, 2015

Anirban and Philip selected to give presentations at Transducers 2015

Anirban Basu and Philip Ponce de Leon have been selected to give presentations at The 18th International Conference on Solid-State Sensors, Actuators and Microsystems in Anchorage, Alaska, June 21-25, 2015. Anirban will present “Nanostructured Silicon Field Emitter Array-Based High-Vacuum Magnetic-less Ion Pump for Miniaturized Atomic Spectroscopy Sensors”. Philip will be presenting “High-Throughput Manufacturing of Polymer Nanofibers
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Paper by Velasquez Group on nanofiber generators receives recognition by the IEEE Journal of Microelectromechanical Systems

The paper “Low-Bremsstrahlung X-Ray Source Using a Low-Voltage High-Current-Density Nanostructured Field Emission Cathode and a Transmission Anode for Markerless Soft Tissue Imaging”, by S. Cheng, F. A Hill, E. V. Heubel, and L. F. Velásquez-García was selected as one of the three JMEMS RightNow Papers of the April 2015 issue of the IEEE Journal of
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MIT News: Unlocking nanofibers’ potential – Prototype boosts production of versatile fibers fourfold, while cutting energy consumption by 92 percent

Nanofibers — polymer filaments only a couple of hundred nanometers in diameter — have a huge range of potential applications, from solar cells to water filtration to fuel cells. But so far, their high cost of manufacture has relegated them to just a few niche industries. In the latest issue of the journal Nanotechnology, MIT researchers
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Paper by Velasquez Group on electrospray ionizers receives recognition by the IEEE Journal of Microelectromechanical Systems

The paper “High-Throughput Ionic Liquid Ion Sources Using Arrays of Microfabricated Electrospray Emitters with Integrated Extractor Grid and Carbon Nanotube Flow Control Structures”, by F. A Hill, E. V. Heubel, P. Ponce de Leon, and L. F. Velásquez-García was selected as one of the three JMEMS RightNow Papers of the October 2014 issue of the
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MIT News: Fast, cheap nanomanufacturing – Arrays of tiny conical tips that eject ionized materials could fabricate nanoscale devices cheaply.

Luis Fernando Velásquez-García’s group at MIT’s Microsystems Technology Laboratories (MTL) develops dense arrays of microscopic cones that harness electrostatic forces to eject streams of ions. The technology has a range of promising applications: depositing or etching features onto nanoscale mechanical devices; spinning out nanofibers for use in water filters, body armor, and “smart” textiles; or
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Our Work on electrospray emitter array ion sources is on the cover of the 2014 MTL Annual Review!

Congratulations to Frances! More information in http://www-mtl.mit.edu/wpmu/ar2014/