HV MEMS Packaging: We have developed a MEMS packaging technology that relies on mesoscaled DRIE-patterned deflection springs to integrate electrostatic lenses to massive arrays of high-voltage devices with great precision and repeatability. | Read more...
Chemical Reactors: Scaling-down and multiplexing chemical reactors (for example, the MEMS singlet oxygen generator shown) increase their efficiency, enabling a wide range of portable applications. | Read more...
Quadrupole Mass Filters: Evolutionary road of miniaturized QMFs to achieve high performance and batch fabrication | Read more...
High Current Electron Sources: Massive arrays of individually ballasted field emitters are the key to implement reliable high-current cathodes. Read more...
Carbon Nanotube Field Devices: Carbon nanotubes can be used to produce localized high electrostatic fields with low voltage, opening the doors to many exciting applications such as portable gas ionizers. Read more...
Multiplexed Electrospray: Multiplexed electrospray has tremendous potential in a wide range of exciting applications: manufacturing (precision printing, etch, nanofibers), analytical instruments (mass spectrometry of biomarkers) and space propulsion (nanosatellites). Read more...

News

Congratulations Shuo for your award at PowerMEMS 2013!

The paper “A Compact X-ray Generator Using a Nanostructured Field Emission Cathode and aMicrostructured Transmission Anode” by Shuo Cheng, Frances Hill, Eric Heubel and Luis Fernando Velásquez-García was selected Best Proceedings Paper by the 13th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2013), being held Dec. 3 to
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A leap forward in X‑ray technology Lightweight, portable device could provide detailed images — even of soft tissue

X-rays transformed medicine a century ago by providing a noninvasive way to detect internal structures in the body. Still, they have limitations: X-rays cannot image the body’s soft tissues, except with the use of contrast-enhancing agents that must be swallowed or injected, and their resolution is limited. But a new approach developed by researchers at MIT
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Shuo and Arash to give oral presentations at PowerMEMS 2013

Two papers have been selected for oral presentation at The 13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications in London, England, December 3-6, 2013. Shuo Cheng will present a talk entitled “A Compact X-ray Generator Using a Nanostructured Field Emission Cathode and a Microstructured Transmission Anode”. Arash will present
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