We have developed a MEMS packaging technology that relies on mesoscaled DRIE-patterned deflection springs to integrate electrostatic lenses to massive arrays of high-voltage devices with great precision and repeatability. | Read more...

Scaling-down and multiplexing chemical reactors (for example, the MEMS singlet oxygen generator shown) increase their efficiency, enabling a wide range of portable applications.   | Read more...

Evolutionary road of miniaturized QMFs to achieve high performance and batch fabrication | Read more...

Massive arrays of individually ballasted field emitters are the key to implement reliable high-current cathodes. Read more...

Carbon nanotubes can be used to produce localized high electrostatic fields with low voltage, opening the doors to many exciting applications such as portable gas ionizers. Read more...

Multiplexed electrospray has tremendous potential in a wide range of exciting applications: manufacturing (precision printing, etch, nanofibers), analytical instruments (mass spectrometry of biomarkers) and space propulsion (nanosatellites). Read more...