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Conclusions

A system has been implemented to provide design of experiments, regression modeling, and optimization capability for use in Technology CAD. The system emphasizes the uniform treatment of model evaluation across numerical simulation and response surface modeling. In this fashion, effective optimization layered on top of existing simulation capability is possible. We have demonstrated the application of the system to process parameter determination, simulator tuning, process control modeling, and statistical process optimization. Future work is needed to extend the system to more fully support emerging device design and process synthesis methodologies [43].