Useful Reading Materials

S. Wolf and R. Tauber, Silicon Processing for the VLSI Era, Lattice Press, 1986.

S.M. Sze, VLSI Technology, McGraw-Hill, Second Edition, 1988.

S.A. Campbell, The Science and Engineering of Microelectronic Fabrication,

Oxford University Press, 2nd edition, 2001.

J.L. Vossen and W. Kern, Thin Film Processes, Academic Press, 1978.

R.F. Pierret and G.W. Neudeck, Modular Series on Solid State Devices, Vol. 1-5, Addison-Wesley, 1984

Journals/Conference Proceedings:

IEEE Transactions on Electron Devices (published monthly)

Applied Physics Letters

Journal of Applied Physics

IEEE IEDM Conference Proceedings, published each December.