From gcure at ece.arizona.edu Tue Jul 3 15:47:05 2007 From: gcure at ece.arizona.edu (Gregg D. Cure`) Date: Tue, 03 Jul 2007 19:47:05 -0000 Subject: [labnetwork] LPCVD nitride process inquiry Message-ID: <4389.206.207.225.24.1183491412.squirrel@secure.ece.arizona.edu> Hello - We at the UofA Micro/Nano Fabrication Center have a 4-stack Amtech/Tempress horizontal diffusion furnace. We run LS nitride, Poly, LTO and PSG. Our ls nitride employs a process temperature of 850C. Our facility constrains require that we idle the tubes at ATM with the heaters off (or at a very low temperature). We are trying to find replacement o-ring sets for our ls nitride tube. The manufacturer specifies a high-temperature silicone variety, medium grey in color, available ONLY in France. This is of course an option, but we face a 6-8 week lead time whenever we seek to order these parts. Does anyone on LabNet have a similar tool set, AND do you have a local supplier for these orings? We would be very interested in hearing from you! Thank you in advance - -- Gregg D. Cure` The University of Arizona Micro/Nano Fabrication Center Electrical and Computer Engineering 1230 E. Speedway Blvd. P.O. Box 210104 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.2760 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu From prnelson at csupomona.edu Wed Jul 4 09:09:30 2007 From: prnelson at csupomona.edu (Dr. Phyllis R. Nelson) Date: Wed, 04 Jul 2007 13:09:30 -0000 Subject: [labnetwork] Rudolph Auto El IV Message-ID: <12A3F9827C9A0244B13F90CDF45EBC4902DA918C@EX01.win.csupomona.edu> We would like to use a computer to bypass the paper tape printer on our Auto El IV. I'd appreciate suggestions from anybody who has done this. Thanks! Dr. Phyllis R. Nelson Professor, Electrical and Computer Engineering co-Director, Center for Macromolecular Modeling and Materials Design California State Polytechnic University, Pomona email: prnelson at csupomona dot edu voice: (909) 869-2649 office: building 9 room 131 From dan at engr.wisc.edu Mon Jul 23 09:13:41 2007 From: dan at engr.wisc.edu (Daniel Christensen) Date: Mon, 23 Jul 2007 08:13:41 -0500 Subject: [labnetwork] material issue diamond in LPCVD Nitride Message-ID: <7.0.1.0.2.20070723080636.02acdfe0@engr.wisc.edu> Greetings, We have a student that wants to put ultra-nanocrystalline diamond into our LPCVD nitride tube. This tube is used for mems and electronics processing. We would like to know if anyone else has experience doing this or if you have any opinions on diamond in a nitride tube. Thus far, our opinion is that is should be ok but we are not completely sure. Thank you for your opinions. Dan Christensen Lab Manager Wisconsin Center for Applied Microelectronics http://www.engr.wisc.edu/centers/wcam/ University of Wisconsin-Madison From brian at s3llc.com Mon Jul 23 14:45:05 2007 From: brian at s3llc.com (Brian Zevenbergen) Date: Mon, 23 Jul 2007 10:45:05 -0800 Subject: [labnetwork] Canon i3 for Sale Message-ID: <00b001c7cd59$9b16bad0$0201a8c0@BrianLaptop> Lab Network - We learned during last week's Semicon show that a University is looking for a Canon i3 stepper. We have such a system in our inventory and would be interested in talking with anyone looking for this type of tool. Sincerely, Brian Zevenbergen Managing Partner Office +1.253.376.6865 Fax +1.425.795.4968 www.S3LLC.com "Total Solutions for Surplus Equipment" -------------- next part -------------- An HTML attachment was scrubbed... URL: