From michaeljberman at gmail.com Mon Mar 12 17:40:58 2007 From: michaeljberman at gmail.com (Mike Berman) Date: Mon, 12 Mar 2007 14:40:58 -0700 Subject: [labnetwork] Questions Message-ID: Hello, I have 2 questions I would like some help with, first which text book is best (or very good) to use for a 200 or 300 level Micro/Nano Fabrication class? The class would be "about" 2 hours a week in a class room and 3 hours in lab, for 16 weeks. The push would be for MEMS not transistors. Other question, do you have a good project (or link) to a project to be used for a one week summer class for high school teachers working in Micro/Nano? It would need to be completed in about 12 hours of fab time. The fab has a normal tool set, for dep, photo and etch, but not for transistors (doping is a problem). Thanks Michael Berman mberman at ece.arizona.edu From joel.pikarsky at mirc.gatech.edu Tue Mar 13 10:08:53 2007 From: joel.pikarsky at mirc.gatech.edu (Joel Pikarsky) Date: Tue, 13 Mar 2007 09:08:53 -0500 Subject: [labnetwork] Questions - Micro/Nano Fabrication text book In-Reply-To: References: Message-ID: <45F6B075.6000901@mirc.gatech.edu> Hello, IMNSHO, the best general, introductory text is "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. Campbell. You may also want to consider "Fundamentals of Microfabrication: The Science of Miniaturization", Second Edition, Marc J. Madou Make sure you use the second edition for either book. I prefer Campbell, it is more focused on the details of processing. Madou has more of a "general overview' flavor. Joel Pikarsky "Scourge of the Cleanroom" Mike Berman wrote: > Hello, > > I have 2 questions I would like some help with, first which text book > is best (or very good) to use for a 200 or 300 level Micro/Nano > Fabrication class? The class would be "about" 2 hours a week in a > class room and 3 hours in lab, for 16 weeks. The push would be for > MEMS not transistors. > > Other question, do you have a good project (or link) to a project to > be used for a one week summer class for high school teachers working > in Micro/Nano? It would need to be completed in about 12 hours of fab > time. The fab has a normal tool set, for dep, photo and etch, but > not for transistors (doping is a problem). > > Thanks > > Michael Berman > mberman at ece.arizona.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From walsh at louisville.edu Tue Mar 13 12:03:49 2007 From: walsh at louisville.edu (Kevin M Walsh) Date: Tue, 13 Mar 2007 12:03:49 -0400 Subject: [labnetwork] Questions - Micro/Nano Fabrication text book In-Reply-To: <45F6B075.6000901@mirc.gatech.edu> References: <45F6B075.6000901@mirc.gatech.edu> Message-ID: <45F69339.F2A4.0054.0@gwise.louisville.edu> Those 2 are excellent texts! I also suggest the paperback "Intro to Microelectronic Fab" by Jaeger whose new edition has a chapter on MEMS (as does Campbell). The Campbell MEMS chapter was well-written by Greg Cibuzar. KW Dr. Kevin M. Walsh Professor of Electrical and Computer Engineering Director of the Lutz and BRB Micro/Nanotechnology Cleanroom University of Louisville BRB Building, Room 234 2210 S. Brook St Louisville, KY 40292 (502) 852-0826 office (502) 852-8128 fax walsh at louisville.edu or walsh at ieee.org www.mems.louisville.edu >>> Joel Pikarsky 3/13/2007 10:08 AM >>> Hello, IMNSHO, the best general, introductory text is "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. Campbell. You may also want to consider "Fundamentals of Microfabrication: The Science of Miniaturization", Second Edition, Marc J. Madou Make sure you use the second edition for either book. I prefer Campbell, it is more focused on the details of processing. Madou has more of a "general overview' flavor. Joel Pikarsky "Scourge of the Cleanroom" Mike Berman wrote: > Hello, > > I have 2 questions I would like some help with, first which text book > is best (or very good) to use for a 200 or 300 level Micro/Nano > Fabrication class? The class would be "about" 2 hours a week in a > class room and 3 hours in lab, for 16 weeks. The push would be for > MEMS not transistors. > > Other question, do you have a good project (or link) to a project to > be used for a one week summer class for high school teachers working > in Micro/Nano? It would need to be completed in about 12 hours of fab > time. The fab has a normal tool set, for dep, photo and etch, but > not for transistors (doping is a problem). > > Thanks > > Michael Berman > mberman at ece.arizona.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From campb001 at umn.edu Tue Mar 13 12:14:35 2007 From: campb001 at umn.edu (Steve Campbell) Date: Tue, 13 Mar 2007 11:14:35 -0500 Subject: [labnetwork] Questions - Micro/Nano Fabrication text book References: <45F6B075.6000901@mirc.gatech.edu> Message-ID: <02c401c7658a$b1ca5cf0$8bab6580@CPQ11808144252> Joel, Thank you for your very kind words. You may be interested to hear that the third edition is at the publisher - hopefully it will be out in the fall. My book was really written for the senior/first year grad level and it is directed primarily at transistors, although the second and third editions include a chapter on MEMS written by Greg Cibuzar. Lower level (tech-level) books include Quirk and Serda, and Xiao. Both are also written for IC manufacturing, not MEMS. Madou is probably the most widely used MEMS book. You may also want to look at a new book by Saliterman, a friend and sort of colleague (Steve is Chief of Surgery at a local hospital as well as an Adjunct in our BioEng Dept.). It focuses on bioMEMS, particularly for medical devices. Steve ----- Original Message ----- From: "Joel Pikarsky" To: Sent: Tuesday, March 13, 2007 9:08 AM Subject: Re: [labnetwork] Questions - Micro/Nano Fabrication text book > Hello, > > IMNSHO, the best general, introductory text is "The Science and > Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. > Campbell. > > You may also want to consider "Fundamentals of Microfabrication: The > Science of Miniaturization", Second Edition, Marc J. Madou > > Make sure you use the second edition for either book. I prefer > Campbell, it is more focused on the details of processing. Madou has > more of a "general overview' flavor. > > Joel Pikarsky > "Scourge of the Cleanroom" > > Mike Berman wrote: >> Hello, >> >> I have 2 questions I would like some help with, first which text book >> is best (or very good) to use for a 200 or 300 level Micro/Nano >> Fabrication class? The class would be "about" 2 hours a week in a >> class room and 3 hours in lab, for 16 weeks. The push would be for >> MEMS not transistors. >> >> Other question, do you have a good project (or link) to a project to >> be used for a one week summer class for high school teachers working >> in Micro/Nano? It would need to be completed in about 12 hours of fab >> time. The fab has a normal tool set, for dep, photo and etch, but >> not for transistors (doping is a problem). >> >> Thanks >> >> Michael Berman >> mberman at ece.arizona.edu >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From joel.pikarsky at mirc.gatech.edu Tue Mar 13 14:09:48 2007 From: joel.pikarsky at mirc.gatech.edu (Joel Pikarsky) Date: Tue, 13 Mar 2007 13:09:48 -0500 Subject: [labnetwork] Questions - Micro/Nano Fabrication text book In-Reply-To: <6.2.1.2.2.20070313121540.052f20e8@imap.ece.gatech.edu> References: <45F6B075.6000901@mirc.gatech.edu> <6.2.1.2.2.20070313121540.052f20e8@imap.ece.gatech.edu> Message-ID: <45F6E8EC.4060103@mirc.gatech.edu> Hello Dr. May, I apologize for the gross oversight! Unfortunately I don't have a copy of your book yet. Raghunath and I were wondering if you had any review copies available?! ;-) Congratulations on your latest book, "Fundamentals of Semiconductor Manufacturing and Process Control"! Joel Pikarsky "Scourge of the Cleanroom" Gary May wrote: > Joel, > > Don't forget > > G. May and S. Sze, /Fundamentals of Semiconductor Fabrication/, New > York, NY: Wiley, 2003. > > Regards, > Gary May > > At 10:08 AM 3/13/2007, you wrote: >> Hello, >> >> IMNSHO, the best general, introductory text is "The Science and >> Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. >> Campbell. >> >> You may also want to consider "Fundamentals of Microfabrication: The >> Science of Miniaturization", Second Edition, Marc J. Madou >> >> Make sure you use the second edition for either book. I prefer >> Campbell, it is more focused on the details of processing. Madou has >> more of a "general overview' flavor. >> >> Joel Pikarsky >> "Scourge of the Cleanroom" >> >> Mike Berman wrote: >> > Hello, >> > >> > I have 2 questions I would like some help with, first which text book >> > is best (or very good) to use for a 200 or 300 level Micro/Nano >> > Fabrication class? The class would be "about" 2 hours a week in a >> > class room and 3 hours in lab, for 16 weeks. The push would be for >> > MEMS not transistors. >> > >> > Other question, do you have a good project (or link) to a project to >> > be used for a one week summer class for high school teachers working >> > in Micro/Nano? It would need to be completed in about 12 hours of fab >> > time. The fab has a normal tool set, for dep, photo and etch, but >> > not for transistors (doping is a problem). >> > >> > Thanks >> > >> > Michael Berman >> > mberman at ece.arizona.edu >> > >> > _______________________________________________ >> > labnetwork mailing list >> > labnetwork at mtl.mit.edu >> > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > Gary S. May, Ph.D. > Professor and Steve W. Chaddick School Chair > School of Electrical & Computer Engineering > Georgia Institute of Technology > Atlanta, GA 30332-0250 > Phone: 404-894-2902 > FAX: 404-894-4641 > E-mail: gary.may at ece.gatech.edu > From pramod.karulkar at uaf.edu Tue Mar 13 12:37:59 2007 From: pramod.karulkar at uaf.edu (Pramod C. Karulkar) Date: Tue, 13 Mar 2007 08:37:59 -0800 Subject: [labnetwork] Questions - Micro/Nano Fabrication text book In-Reply-To: <45F6B075.6000901@mirc.gatech.edu> Message-ID: <200703131638.l2DGc4ss491777@smtp.uaf.edu> There are several older text books which would work just fine for a thin film device technology class or lab. You can get them in the used book market for almost nothing. A series of books by TI and Motorola are becoming antique but you may find them free. A simple intro can be found in "Microelectronics by Roy Colclaser" which you can get for a dollar on Amazon Used. "Integrated Circuits by W. C. Till" and "Integrated Circuit Engineering by Glaser and Subak-Sharpe" are also good. There also an old book called photoresist or photolithography written by an applications engineer which is a very good introduction. Good luck. Pramod C. Karulkar, Ph. D. President's Professor & Director Office of Electronic Miniaturization University of Alaska Fairbanks 3330 Industrial Avenue Fairbanks, AK 99701 Office: 907 455 2008 Cell: 907 322 0225 Assistant : 907 455 2000 FAX 907 455 2019 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Joel Pikarsky Sent: Tuesday, March 13, 2007 6:09 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Questions - Micro/Nano Fabrication text book Hello, IMNSHO, the best general, introductory text is "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. Campbell. You may also want to consider "Fundamentals of Microfabrication: The Science of Miniaturization", Second Edition, Marc J. Madou Make sure you use the second edition for either book. I prefer Campbell, it is more focused on the details of processing. Madou has more of a "general overview' flavor. Joel Pikarsky "Scourge of the Cleanroom" Mike Berman wrote: > Hello, > > I have 2 questions I would like some help with, first which text book > is best (or very good) to use for a 200 or 300 level Micro/Nano > Fabrication class? The class would be "about" 2 hours a week in a > class room and 3 hours in lab, for 16 weeks. The push would be for > MEMS not transistors. > > Other question, do you have a good project (or link) to a project to > be used for a one week summer class for high school teachers working > in Micro/Nano? It would need to be completed in about 12 hours of fab > time. The fab has a normal tool set, for dep, photo and etch, but > not for transistors (doping is a problem). > > Thanks > > Michael Berman > mberman at ece.arizona.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From hbtusainc at yahoo.com Thu Mar 15 17:13:41 2007 From: hbtusainc at yahoo.com (Mario Portillo) Date: Thu, 15 Mar 2007 14:13:41 -0700 (PDT) Subject: [labnetwork] ultractech 603 Message-ID: <20070315211341.91697.qmail@web52301.mail.re2.yahoo.com> For sale... Mario A. Portillo Sr. High'born Technology USA Inc. Semiconductor Equipment Services 5970 SW 18th St. Suite 227 Boca Raton, FL 33433 561 504-0244 cell 561 470-1975 office 561 395-0074 fax hbtusainc at yahoo.com ____________________________________________________________________________________ Don't pick lemons. See all the new 2007 cars at Yahoo! Autos. http://autos.yahoo.com/new_cars.html