[labnetwork] Questions - Micro/Nano Fabrication text book
Joel Pikarsky
joel.pikarsky at mirc.gatech.edu
Tue Mar 13 10:08:53 EDT 2007
Hello,
IMNSHO, the best general, introductory text is "The Science and
Engineering of Microelectronic Fabrication", 2nd edition, Stephen A.
Campbell.
You may also want to consider "Fundamentals of Microfabrication: The
Science of Miniaturization", Second Edition, Marc J. Madou
Make sure you use the second edition for either book. I prefer
Campbell, it is more focused on the details of processing. Madou has
more of a "general overview' flavor.
Joel Pikarsky
"Scourge of the Cleanroom"
Mike Berman wrote:
> Hello,
>
> I have 2 questions I would like some help with, first which text book
> is best (or very good) to use for a 200 or 300 level Micro/Nano
> Fabrication class? The class would be "about" 2 hours a week in a
> class room and 3 hours in lab, for 16 weeks. The push would be for
> MEMS not transistors.
>
> Other question, do you have a good project (or link) to a project to
> be used for a one week summer class for high school teachers working
> in Micro/Nano? It would need to be completed in about 12 hours of fab
> time. The fab has a normal tool set, for dep, photo and etch, but
> not for transistors (doping is a problem).
>
> Thanks
>
> Michael Berman
> mberman at ece.arizona.edu
>
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