[labnetwork] Questions - Micro/Nano Fabrication text book

[Pramod C. Karulkar]

There are several older text books which would work just fine for a thin
film device technology class or lab.  You can get them in the used book
market for almost nothing.  
A series of books by TI and Motorola are becoming antique but you may find
them free.   
A simple intro can be found in "Microelectronics by Roy Colclaser" which you
can get for a dollar on Amazon Used.   
"Integrated Circuits by W. C. Till" and "Integrated Circuit  Engineering by
Glaser and Subak-Sharpe" are also good.  

There also an old  book called photoresist or photolithography written by an
applications engineer which is a very good introduction. 

Good luck. 

Pramod C. Karulkar, Ph. D. 
President's Professor & Director
Office of Electronic Miniaturization
University of Alaska Fairbanks
3330 Industrial Avenue
Fairbanks, AK 99701
Office: 907 455 2008
Cell: 907 322 0225
Assistant : 907 455 2000
FAX 907 455 2019

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Joel Pikarsky
Sent: Tuesday, March 13, 2007 6:09 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Questions - Micro/Nano Fabrication text book

Hello,

IMNSHO, the best general, introductory text is  "The Science and 
Engineering of Microelectronic Fabrication", 2nd edition, Stephen A. 
Campbell.

You may also want to consider "Fundamentals of Microfabrication: The 
Science of Miniaturization", Second Edition, Marc J. Madou

Make sure you use the second edition for either book.  I prefer 
Campbell, it is more focused on the details of processing.  Madou has 
more of a "general overview' flavor.

Joel Pikarsky
"Scourge of the Cleanroom"

Mike Berman wrote:
> Hello,
> 
> I have 2 questions I would like some help with, first which text book
> is best (or very good) to use for a 200 or 300 level Micro/Nano
> Fabrication class?  The class would be "about" 2 hours a week in a
> class room and 3 hours in lab, for 16 weeks. The push would be for
> MEMS not transistors.
> 
> Other question, do you have a good project (or link) to a project to
> be used for a one week summer class for high school teachers working
> in Micro/Nano?  It would need to be completed in about 12 hours of fab
> time.   The fab has a normal tool set, for dep, photo and etch, but
> not for transistors (doping is a problem).
> 
> Thanks
> 
> Michael Berman
> mberman at ece.arizona.edu
> 
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