[labnetwork] Aluminum Sputtering
Joseph E. Palmer
jpalmer at Princeton.EDU
Fri Oct 26 16:39:53 EDT 2007
Can anyone suggest any papers on sputtering aluminum? I am looking at
preventing the Al from depositing all over the chamber, as its light
weight allows it to go much further than other metals.
Thanks,
Joe Palmer
Facilities Manager,
PRISM Micro/Nano Fabrication Laboratory
Princeton University
--
"Freedom should never be confused with license, nor tolerance with acceptance." - Unknown
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